Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

Air cylinder (Series compatible with secondary batteries)

Grease pack part number: GR-D-005 (5g), GR-D-010 (10g), G-D-100 (100g) Table 13 Wear ring Wear ring number 40 C2A40-07-305B 50 C2A50-07-305B 63 C2A63-07-305B 80 C2A80-07-305B 100 C2AA0-07-305B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZR IN side, OUT side (/min (ANR)) Weight (g) Model ZM ZFC100-04 4 10 11.5 ZFC100-06 6 20 ZH Metric size ZFC200-06 6 30 21.5 ZU ZFC200-08 8 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY

Ｖ cylinder

Wear ring number Wear ring number 40 C1A040-07-305B 50 C1A050-07-306B 63 C1A063-07-307B 80 C1A080-07-308B 100 C1A100-07-309B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2. Storage of seals C a u t i o n Store seals in sealed packaging such as polyethylene bag and place it in a box.

Vacuum Unit Series ZK2

ZK2 07 Without option B 10 09 Bracket P to N C to N Use when a single unit is mounted to the floor in an upright position is requested.

3-STA. MANIFOLD, V100, 3 PORT SOLENOID VALVE, VVD, 26.70000 lb

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

HRX-OM-M005

Alarm1 Water Leak Detect FLT 01 Alarm2*1 02 Alarm3 RFGT High Press FLT 03 Alarm4*1 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Direct Solenoid

Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135

IZx-OMV0005

Dimensions 06 07 Energy saving nozzleIZN10E-01 06 07 High flow rate nozzleIZN10E-02 Note M3 x 0.5 depth 4 Ground terminal 2 x M3 x 0.5 depth 10 Note Note) Dimensions of the area ( shaded) on page 5 Mounting 3).

20

Blow Gun New New RoHS 20 20% reduction reduction 20% reduction with the SMCBlow gun+S coupler+Coil tube in power consumption 10% reduction with theBlow gun (VMG) only New New New With cover Extension nozzle Added 100 mm and 150 mm lengths Pressure loss1% or less M Amount of electricity used in a factory Actuators 10% Air 20% DOWN 20% Air leakage 20% Coolant 30% Air blow 56% Air blow 70% Others

Air cylinder

Consumable parts 3-3-1 Replacement parts 20 25 32 40 Seal kit number CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS Grease pack (Accessory) GR-S-010(10g) Rod seal Piston seal Contents of the Tube gasket seal kit Grease pack (10g) 1pc. of each 20 25 32 40 Wear ring CM-020-07-301B CM-025-07-302B CM-032-07-304B C1A040-07-305B Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n

AS

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations