Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

C95Series

Part S humber ore size (mm) .B fA TL TU Te TX TE TO TFl OTT TS TH TF 'z TD~HO MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 a9 12j.o10 MB-S04 40 52 80 60 10 60 63 97 17 9 17 12 45 60 93 16 "'0 .010 50 65 60 60 10 92 75 \09 17 9 17 12 45 60 105 16 _g om Mounting plate (Double clevis) MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 BO 105 20 ...0 a64 .20 ~,084 80 95 100 70 \5 \30 110 150

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

9 8 8 7 9 8 8 7 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without

CQM

-35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75

53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

PFxx-OMA1007

74.7 EXA1-40 240.4 51 64.4 4.6 71 35.5 75.6 -145No.PF-OMA1007-B EXA1-60-SA-# Refer to separate operation manuals for other AMS components. -146No.PF-OMA1007-B Accessories Seal cap (10 pcs.)

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Guide Cylinder/Compact Type Series MGC

Auto switch model Same surface Same surface D-A9 D-M9 D-M9W 10 Note) 45 45 + 45 (n-2) D-C7 D-C80 10 50 50 + 45 (n-2) D-H7 D-H7W D-H7BAL D-H7NF 10 60 60 + 45 (n-2) D-C73C D-C80C D-H7C 65 + 50 (n-2) 10 65 D-B5 D-B64 D-G5 D-K59 D-B59W 75 + 55 (n-2) 10 75 D-B7 D-B80 D-G79 D-K79 50 + 45 (n-2) 10 45 MGJ Note) For cylinders with 2 auto switches D-A93/M9/M9W.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

SMC

35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

Bernoulli Gripper

Please make your selection carefully. 1.5 ZNC(40, 60)P Resin 0.76 ZNC(40, 60)S Stainless steel 1.5 ZNC80 Aluminum M4 x 0.7 8 The lifting force changes depending on the shape, size, surface unevenness, breathability, flexibility, etc., of the workpiece. 3 ZNC80P Resin 1.5 ZNC80S Stainless steel 3 M5 x 0.8 10 3.