High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

b 0.26 0.20 0.22 0.19 b 0.35 0.18 0.21 0.18 C6 C8 C10 C12 C8 C10 C12 C12 10-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Compact Cylinder with Solenoid Valve/

of the rated voltage DC Power consumption 0.35 (With light: 0.4) W Bore size Standard stroke 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

HRX-OM-Z002

at an ambient temperature of 30 oC.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

6.5 7.0 7.5 8.0 Parallel gripper 6.5 7.0 7.5 8.5 30 to 10 30 to 10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Note) The operating range for grippers is measured when both ends are open.

Vacuum Module Series ZX

SMC SMC 6 20 10 Pitch = 21 10 10 10 L2 L1 L3 Body (Air operated type) (ZX1A) Pressure setting trimmer 9.3 13 Vacuum switch ZSE2 14.5 M5 x 0.8 (Pilot port) Filter A: Release flow rate adjusting needle with lock nut Adapter B 6 44 M5 x 0.8 (External release port) Silencer + Ejector 30 22 47 37.4 8 Adapter D 57.4 (Needle fully open) Individual spacer ZX1-R1 70.3 Release valve (VJ314) (Normally

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

Rotary Cylinder Series MRQ

weight [kg] 2.5 Effective torque (Nm) MRQS40 15 150 2 10 100 1.5 40 4 5 40 50 32 1 MRQS32 2 2.5 3 20 25 30 0.5 0 1.5 15 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 1 0.4 0.5 0.6 0.7 10 6.

Support Guide/11-LEFG Series

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work

53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

ZQ-OM01401

ZQ000A (PD) 80 80 0.45MPa 70 70 [L/min(ANR)] [L/min(ANR)] 0.5MPa 0.35MPa 60 60 50 50 0.25MPa 0.35MPa 0.3MPa 40 40 0.15MPa 30 30 20 20 0.05MPa 10 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [] ZQA (PD) 80 70 [L/min(ANR)] 0.45MPa 60 50 0.35MPa 40 0.25MPa 30 0.15MPa 20 0.05MPa 10 0 0 1 2 3 4 5 [] 38 - No.ZQ-OM01401-B V [L/min (ANR) ] 1) (PD) V P,PS [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.1 0.2 3.2 0.3

JXCx-OMX0009

Cable colour Terminal No. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 A A-2 Black 6 B 15m* B B-3 Orange 9 C 20m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 * Produced upon receipt SD-(TX) A-4 Black 10 of order Black 3 Actuator side Controller side (14.2) (c) (b) (10.2) (5.5 (6.7 (12.7) 6 2 1 (a) (14 (18) A B 5 6 (13.5) 1 3 1 4 2 1 (30.7) (14.7) 15 16 (d) L (10) (11) 10 - [2] Actuator

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

Electric Actuator / Low profile slider type

Origin offset-10 Origin 50mm Motor side End side 0 10 20 30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.