SMC Pneumatic Clean Series

20 14 5 4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.

Process Valve

(P1) 10 (P2) 12 (P1) Allowable voltage fluctuation SGC 50C or less (When rated voltage is applied.)

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

100 V, 200 V 12 V 2-wire 24 V CJ1 No 200 V or less Relay, PLC Yes Connector 24 V or less 5 V, 12 V No IC circuit CJP Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) IC circuit CJ2 5 V, 12 V Grommet 12 V 2-wire CM2 Connector 3-wire (NPN) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 3-wire (PNP) 24 V CG1 Courtesy of Steven

RQ

12 13 12 12 12 11 10 D-A79W D-A9, A9V 16 11.5 15 9 17 11.5 13 13 13 14 14 9.5 9.5 9.5 D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 D-M9, M9V D-M9W, M9WV D-F9BAL 4 4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Yes A96V A96 Reed switch 5 V Grommet Relay, PLC 24 V 2-wire A93V A93 100 V 12 V 3-wire (NPN) M9NV M9N IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V Relay, PLC Yes Grommet 24 V Diagnostic indication 2-color indication F9NWV F9NW 3-wire (NPN) IC circuit 5 V 12 V 3-wire (PNP) F9PWV F9PW F9BWV F9BW 2-wire 12 V Notes) Solid state switches marked with a symbol are produced upon

LEH_C

ON/OFF / / 2 2 3 3 1 2 / 11 - 5.3 [] (LEC ) (LEC ) / P.42 7.3 <> (NPNPNP) LEHZ10K2-4 NPN <> INP(IN ) INP ON ON INP ON OFF ) P.50,P.52 8.3 12 - <> No.0 a b c d e f g h i j k a ABSINC ABS() / / INC()// b c ) / P.50 8.3 d e f 0(0 ) g h i )150%/ P.52 8.3 j 12 AREA ON 121 INC ABS() )No.0 120 222 AREA 13 - k INP(IN )ON INP INP ON )0.50 )No.0 22 10 12 INP 14 -

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

VEX1

AMC Caution This valve is not a non-leak specification, and thus cannot be used for a long term intermediate stops or emergency stops. 5.1-12 VEX3 How to Order Electrical entry (Only solenoids) Body size Port size Symbol Body size Electrical entry Port size Port R port P, A port 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet, 300mm lead wire H Grommet, 600mm lead wire L plug connector

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Series PF2W Digital Flow Switch For Water

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Environment Voltage output 1 to 5 V Accuracy: 5%F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog output Current output 4 to 20 mA Accuracy: 5%F.S., Max. load impedance: 300 or less (at 12 VDC), 600 or less (at 24 VDC) 12 to 24 VDC 10% Power

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Pilot Operated

Use compatible heavy duty cords with cable O.D. of 6 to 12. Use the tightening torques below for each section.

IDX-OM-W010

Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13 Specification for Option S 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Power supply connection procedure . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Specification

IDX-OM-W011

R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011

IDX-OM-W025

Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13 Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power supply and signal cable . 13 2

IDX-OM-W026

R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

IDX-OM-W019

Specification for Option V 12 1 Safety instructions. 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 Chapter 13 Service Record 13 1 Service Record . 13 1 IDFB Series Table of Contents 2 IDX-OM-W019 Air dryer i Safety Instructions i Safety Instructions Before use,read and comprehend important cautionary notification well on this operation manual. i-1 Warning: Before

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve