Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

Compressed Air Cleaning Filter Series

AME150C AME450C AME650 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) AME250C AME550C AME850 Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

HRX-OM-X010

mgCaCO3/L) Max.200 Max.70 Standards Calcium hardness (mgCaCO3/L) Max.150 Max.50 Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper (mgCu/L) Max.0.3 Max.0.1 Sulfide ion (mgS2-/L) Not be detected Ammonium ion (mgNH4+/L) Max.1.0 Max.0.1 Residual chlorine (mgCl/L) Max.0.3 Max.0.3 Free carbon dioxide (mgCO2/L) Max.4.0 Max.4.0 Filtering (m) Max.5 * According to the Water

13

rate (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption Suction flow rate Suction flow rate Suction flow rate (l/min (ANR)) Supply pressure (MPa) Suction flow rate (l/min (ANR)) Supply pressure (MPa) ZH10S Max. vacuum

CG1

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

Combination Cylinder

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

48

LEL25MT-100l-l LEL25MT-200l-l LEL25MT-300l-l LEL25MT-400l-l LEL25MT-500l-l LEL25MT-600l-l LEL25MT-700l-l LEL25MT-800l-l LEL25MT-900l-l LEL25MT-1000l-l LEL25LT-100l-l LEL25LT-200l-l LEL25LT-300l-l LEL25LT-400l-l LEL25LT-500l-l LEL25LT-600l-l LEL25LT-700l-l LEL25LT-800l-l LEL25LT-900l-l LEL25LT-1000l-l With motor cover 272.5 372.5 472.5 572.5 672.5 772.5 872.5 972.5 1072.5 1172.5 292.5 392.5

PFxx-OMS0001CN

200KPa 400KPa 400KPa L/Min L/Min PFMC7202(2000 L/min) kPa L/Min -69No.PF-OMS0001CN-A IN 3F.S.8cm IN OUT [%F.S.]

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

0.55

Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

CNA

T K ZZ + l + Stroke h + l C FT BN N CLS B H M S + Stroke ZZ + Stroke CLQ Long stroke (50 to 100) 4-FD MLGP RLQ MLU FY BF RY e d ML1C 8 f l ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8

CNA

T K ZZ + l + Stroke h + l C FT BN N CLS B H M S + Stroke ZZ + Stroke CLQ Long stroke (50 to 100) 4-FD MLGP RLQ MLU FY BF RY e d ML1C 8 f l ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

PFxx-OMP0001CN

min] ON OFF [] PFMB7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMB7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMB7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(28)[F 2]OUT2(36) -22No.PF-OMP0001CN-F <> 1 [P_1][n_1][] 500 L/min

Series VQ Metal Seal/Rubber Seal Body Ported

L=12.5 X n+10.5 L dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll VZ Note 1) Threaded port.

Modular F.R.L. Units

min(ANR) Flow rate L/min(ANR) Flow rate L/min(ANR) AC40-A Rc 1/2 AC40-06-A Rc 3/4 0.6 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 0 1000 2000 3000 4000 Flow rate L/min(ANR) Flow rate L/min(ANR) Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa, Outlet pressure 0.2 MPa, Flow rate 20 L/min(ANR) AC30

Air Cylinder Series CS1

CA2 h + l ZZ + l + 2 stroke (With rod boot on one side) CS1 CS2 With rod boot (Both sides) FA G G FA Width across flats KA Width across flats KA 2 x P MM MM e D e D E E d d M AL AL l + Stroke A f l N N A K f K h + l h + l + Stroke S + Stroke ZZ + 2l + 2 stroke (mm) Type Stroke range (mm) Bore size (mm) AL B C D E EA F FA G J K KA M MM N P S A With rod boot Without rod boot 1 2 1 2 3 4 3 4

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

GA R 2-RcP CDH9 J H MM D E e Width across flats G l 10 f 0.1 0.4 CX NB Air release Air release SS + Q + l + Stroke C NA T B U ZZ + Q + l + Stroke S + Stroke K F L MA A RR SS + Stroke ZZ + Stroke (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB NA NB P R S T CX CD RR SS U L e f Q 32 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 22 38 52 21.5 15 25 to 1400 1/