Table of Contents

Note 6) When the current output is selected.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size No.

•

12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Dual Rod Cylinder Series CXSJ/CXS

6 @0 !4 !8 @2 !5 r u !1 q !6 i t y e @2 @6 @5 @4 @8 @7 @5 @6 @3 @4 Close-up of A Close-up of A Component Parts: CXSM Component Parts: CXSL Note Material No. Description Note Material No.

Compact Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !

LEC-OM069xx

1 6 Utility Functions (Fn) 6.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

C95

See page 6-12-10 for dimensions. See page 6-12-10 for dimensions.

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

Air Cylinder

The base oil of grease may seep out. 6.

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

2 Phase Stepper Motor/Without Motor Brake Series LXS

Example) F9N1G2 AC servomotor Motor type A 6 6 pcs.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9[51.1

Electric Slide Tables

6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

KQ2

(mm) 3.2 4 6 Mass (g) D 2 x applicable tubing Model D L Q M KQ2L23-00 KQ2L04-00 KQ2L06-00 3 6 6 9.6 10.4 12.8 17.5 18 20 4.3 4.5 5.3 15.5 16 17 3 4.2 11.4 2.5 4.2 9.0 8 KQ2L08-00 15.2 23 6 18.5 21.6 14.9 10 10 KQ2L10-00 18.5 26.5 6.8 21 35.2 25.0 17 D 12 KQ2L12-00 20.9 28.5 7.5 22 50.2 39.7 21 16 KQ2L16-00 26.5 34 10 25 100 (84) 29 8 4.2 Note 1) D: Max. diameter Note 2) ( ): Valves for soft

Electric Actuator

Mounting hole (Bearing surface thickness 5) CNP1 CNP2 130 120 CN1 CN3 CN2 6 5 5.5 LECSBm 40 6 Mounting hole 6 135 (Bearing surface thickness 4) 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 1 Battery included. 73 Incremental Type Series LECSA Absolute Type Series LECSB Specifications Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) AC Servo Motor Model Selection Specific

MXS

6 !7 !8 !

Air Slide Table Series MXQ

" W W My Mp Mr W W W K=1 6& & 6, . 6* , < MXH Mp W Mr W My W W MXU 6, 1 W 6& * 6* ) K=0.6 W MXS Mey Mep MXQ ; # ; ( 6* ) MXF * 6, MXW ; # 9 $ 9 $ MXJ Graph (1) Allowable Load Mass Coefficient: Table (1) Allowable Kinetic Energy: Emax (J) Table (2) Maximum Allowable Load Mass: Wmax (kg) MXP $ 5 MXY &(' 9 4 5 " '('&2 '('*+ '('.. '(&& '(&1 '(*) $ '('''('&, '('*+ '('.. '('2' '(&* 7 '('.)

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 6 9 6 (b) 1 6.2.3 2 (No.PA080003) 3 ( ) 4 5 6 7 8 7.27.3 9 38 10 (c) (VG2PB09) (Hz) 2 ) (1 1 + X2 (VICPB10) (ms) 20003000 ) /(1 /1+ 6 10 6 (PG2PB08) 8 1 4 1 1 + ) (1 (PG1PB07) () 8 1 4 1 1 + ) (1 6 11 6 6.4 X-Y2 (1) (a) No. PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) No.