Series KP/KPQ/KPG

1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination controlled stainless steel regulator Series Body Diaphragm Port size Rc Liquid-contact part materials 1/8 1/4 3/8 1/2 9/16-18UNF 7/8-14UNF Series SRH Liquid-contact surfaces PTFE + Fluoro rubber (grade A) Fluoro rubber (grade B) SUS316L (fluid-contact

KS/KX

SKX, #16 to #30 Hl Dl MS Tl 2.1-34

MGZ Series

Model Screws Proper tightening torque Nm L1 L2 MGZ40 MGZ50 MGZ63 12 4.1 to 6.4 M6 x 1.0 16 15 8.8 to 13.8 M8 x 1.25 16 15 8.8 to 13.8 M8 x 1.25 16 Correct Incorrect 3. Under horizontal or downward operating conditions, lurch prevention measures may be required for the cylinder's extending operation.

Series KP/KPQ/KPG

1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination controlled stainless steel regulator Series Body Diaphragm Port size Rc Liquid-contact part materials 1/8 1/4 3/8 1/2 9/16-18UNF 7/8-14UNF Series SRH Liquid-contact surfaces PTFE + Fluoro rubber (grade A) Fluoro rubber (grade B) SUS316L (fluid-contact

VP4

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) Bore sizes (mm) 16 20 25 32 Piston seal: 1 pc. Rod seal: 1 pc. Gasket: 1 pc. CUX16-PS CUX20-PS M3 0.54 10% CUX25-PS M4 1.23 10% Grease pack (10g): 1 pc. CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2.

Low Friction Cylinders Metal Seal Type

(mm) Operating pressure range (MPa) Actuation speed (mm/s) MQML Standard type 6(Standard only) 10 16 20 25 6: 0.02 to 0.7 10 to 25: 0.005 to 0.7 0.5 to 1000 5 to 3000 MQMLH High speed/frequency 0.01 to 0.7 NEW NEW Low Friction Cylinder (Single Acting) Series MQP Bore size (mm) 4 6 10 16 20 Operating pressure range (MPa) Thrust control standard (N) Series 0.01 to 8 0.03 to 19 0.08 to 50 0.20

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

3 Series LQ , LVN, TL/TIL High Purity Fluoropolymer Fittings/Needle Valve/Tubing 1 2 Series LQ2 Variations P.16 Port size Tubing O.D.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

Heavy Duty Stopper Cylinder Series RSH/RS1H

24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 For LVM14R 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O.

5 Port Solenoid Valve Series SV

Tie-rod base A 34 pin connector allows up to 16 stations with double solenoids.

ZQ-OM01401

0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--

PSxx-OMR0001CN

ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A G1/8 ISA-12-C CF -11No.PS-OMR0001CN-J 2 ISA-19ISA-20 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

3 Port Solenoid Valve/

Thread Rc G NPT Nil None Port size 06 3/4" 10 1" A Yes 8 B 5/16" For internal pilot, the symbol is nil. Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

SYA3000/5000/7000

port size Thread type Thread piping Rc Nil Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 M5 x 0.8 One-touch fitting for N NPT SYA3000 1 8 1 4 Except for M5 1 4" One-touch fitting for NPTF T 5 32" One-touch fitting for 1 4" SYA5000 One-touch fitting for One-touch fitting (Metric size) Bracket 5 16

5 Port Air Operated Valve SYA3000/5000/7000 Series

piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16

DOT/J844 Nylon Tubing

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S