0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4

EX180-SDN3_4_5_6_eng

Dual power supplies B.

0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4

0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142

0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Mounting Basic type Axial foot type Front flange type Rear flange type Single clevis type Double clevis type Front trunnion type Rear trunnion type Integral clevis type Boss-cut basic type B L F G C D U T E BZ Boss-cut front flange type FZ Bore size Cylinder stroke (mm) Refer to the standard stroke table on page 10. 20 25 32 40 20mm 25mm 32mm 40mm Boss-cut front trunnion type

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

PVC Quick Drain Valve

0 1 Body PVC 2 Housing PVC LVW LVW q 3 Poppet PTFE w 4 Union end PVC LQ1 5 Union nut PVC 6 O-ring EPDM FKM LQ3 7 O-ring EPDM FKM 8 O-ring EPDM FKM LVN 9 O-ring EPDM FKM 10 O-ring EPDM FKM LQHB OUT TL TIL TLM TILM Dimensions TD TID TH TIH D3 D2 D1 IN L1 L2 L4 L3 L1 2 x Rc1/8 (NPT1/8) Pilot port PA PB Dimensions (mm) Part no.

Lock-Up Valve IL201/211/220 Series

4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread Model 5 32 1 4 5 16 " " " " 3 8 Male connector KSH 10-32 UNF KQ2 1 8 NPT KQB2 NPT 1 4 KS KX KS KX NPT 3 8 KM Male elbow KSL 10-32 UNF KF NPT 1 8 M NPT 1 4 H/DL L/LL NPT 3 8 KC KK Precautions KK130 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.

Series GS40 Digital Pressure Sensor

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

Series GS40 Digital Pressure Sensor 1

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 2 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Speed Controller: Standard Type In-line Type AS Series

Description Material Note 9 10 11 12 O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Steel Note) NBR Brass Brass Steel Needle guide Electroless nickel plated Electroless nickel plated Handle E type snap ring Stainless steel Note) Option: The round lock nut is made of electroless nickel plated brass. Replacement Parts No.

Manifold Specifications

port type Nil Rc Valve stations N NPT 1 Common EXH Bottom Side P Side Side A E T NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11, L2 = 38n + 24 n

Series: 2 (10-SV2000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 2 (10-SV2000), Base Type: 10FD, Connector Entry Direction: 2 (Lateral), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C8 (One-touch Fitting for Ø8), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C4 (One-touch Fitting for Ø4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)