0.4

unit S kit P kit F kit L kit !

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Air Slide Table Series MXS

L)-X11 15 B 40 MXS-AT12 (L)-X12 25 C 24.5 MXS-AT16 (L) 5 F K K F MXS16 (L) M5 x 10 M10 x 1 40 23 15 10 14 5 38.5 34.5 MXS-AT16 (L)-X11 15 A J 44.5 MXS-AT16 (L)-X12 25 27.5 MXS-AT20 (L) 5 MXS20 (L) 50 29 21 12 17 6 48 37.5 M12 x 1.25 M5 x 12 MXS-AT20 (L)-X11 15 47.5 MXS-AT20 (L)-X12 25 32.5 MXS-AT25 (L) 5 MXS25 (L) 60 35 23 15 19 6 58 M14 x 1.5 M6 x 16 42.5 MXS-AT25 (L)-X11 15 52.5 MXS-AT25

Vacuum Unit

ZK207 Flow Rate Characteristics Exhaust Characteristics 100 50 100 Vacuum pressure [kPa] 80 90 45 60 Suction flow (Port exhaust) 80 40 40 Vacuum pressure 70 35 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 60 30 Suction flow [L/min (ANR

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L dimension 1.5 m 3 m 5 m Part no. L dimension 1.5 m 3 m 5 m AXT100-MC26-015 AXT100-DS25-015 AXT100-MC26-030 AXT100-DS25-030 AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C-24308. L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no.

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

Digital Flow Switch (Remote type monitor unit)

/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector output, PNP

Digital Flow Monitor

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

4-channel Flow Monitor (Remote type monitor unit)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 255 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1 2 5 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector

CXS

L A93L 5m .

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

58

f C B h + l A K N N H F F ZZ + l + 2 x strokes S + Stroke H + Stroke ZZ + 2 x strokes V W Cushion valve Port 4 x J G G 2 x P (Rc, NPT, G) M Width across flats KA Width across flats KA MM MM With rod boot (Both sides) E E D D e e C B l + Stroke l AL AL C B f f A K N N A K h + l h + l + Stroke S + Stroke ZZ + 2 x l + 2 x strokes (mm) Bore size (mm) Stroke range (mm) P S N MM M K KA W V J G

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Pin Clamp Cylinders

KU32 Series 32 How to Order Clamping height LOW type KU L 32 075 R A L P3DWASC C X2321 X2322 C Clamping height HIGH type L H M9BWV 32 075 R A KU Number of auto switches With lock Nil Without lock L With lock Nil 2 pcs.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

L type plug connector is used for 3 position AC.

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

Air Pilot Operated Series NVSA

: : ' t : : : : , t t l l i , , 1 : : . ' . , 1 : : ' , , . _ , , ; , : . : , : ; : , , , : : . , , 1 : : . i r . r : i i i ; . , , , : : ; , , . : : : : : : : : : : : : : 1 1 1 : 1 1 l : : : : : : : : : : : : . ' r r , : ' _ i l , ; r , ' , ' . , r , ' ' ' , 1 , , 1 l l r r , | t , r , , , l l ' , r , . : : " : : , . !

MY2

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

() Blue DC () When used as an IO-Link device Brown L + L + Black C/Q Main circuit C/Q IO-Link master Gray NC White NC Blue L L 19 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification M5 For 20 25