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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-G

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f. Option / Semi-standard symbol: Enter them alphanumerically.

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Modular Type Lubricator Series AL

Modular Type Lubricator Series AL Lubricator Series AL Model Accessory Port size AL10 M5 x 0.8 1/8, 1/4 AL20 1/4, 3/8 AL30 AL40 1/4, 3/8, 1/2 Bracket AL40-06 3/4 AL50 3/4, 1 AL60 Pages 50 through 54 1 49 Lubricator AL10 to 60 How to Order AL 2R 30 03 B F Optional specifications Lubricator Symbol 1 10 11 2 3 6 8 C R 3W Z Description 1000cm3 tank 1000cm3 tank with level switch (lowest limit

Filter Regulator AW30, 40

Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

9.8

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROL, TAMPER PROOF, AIRLINE EQUIPMENT, AS FLOW CONTROL, CB, AS 1/8INCH STANDARD (PT), 0.05511 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, ELBOW TYPE, AIRLINE EQUIPMENT, AS FLOW CONTROL, C7, AS 1/8INCH EUROPEAN, .05511 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, TAMPER PROOF, AIRLINE EQUIPMENT, AS FLOW CONTROL, C7, AS 1/8INCH EUROPEAN, .07054 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, ELBOW TYPE, AIRLINE EQUIPMENT, AS FLOW CONTROL, D7, AS 1/4INCH EUROPEAN, .14109 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROL, TAMPER PROOF, AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), 0.05692 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, TAMPER PROOF, AIRLINE EQUIPMENT, AS FLOW CONTROL, D7, AS 1/4INCH EUROPEAN, .05930 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, E7, AS 3/8INCH EUROPEAN, .24034 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, ELBOW TYPE, AIRLINE EQUIPMENT, AS FLOW CONTROL, E7, AS 3/8INCH EUROPEAN, .24034 lb