HRX-OM-W032

discharge pressure sensor failure Compressor intake AL27 pressure sensor failure AL28 Pump maintenance AL29 Fan maintenance10 AL30 Compressor maintenance AL31 Contact input 1 signal detection AL32 Contact input 2 signal detection Compressor AL37 discharge temp. sensor failure AL38 Compressor discharge temp. rise 9: Default value when AS11 is set to either A.STP or A.RUN. 10: AL.08 and AL.09

Vacuum Pad

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

Vacuum Pad

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

Vacuum Pad

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

Vacuum Pad

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

AC Servo Motor Driver (Pulse input type/Positioning type ）

Table 5.10 Selectable input devices Setting Input device (Note 1) value P S T 02 SON SON SON 03 RES RES RES 04 PC PC 05 TL TL 06 CR 07 ST1 RS2 08 ST2 RS1 09 TL1 TL1 0A LSP LSP LSP (Note 3) 0B LSN LSN LSN (Note 3) 0D CDP CDP 0E CLD 0F MECR 20 SP1 SP1 21 SP2 SP2 22 SP3 SP3 23 LOP (Note 2) LOP (Note 2) LOP (Note 2) 24 CM1 25 CM2 26 STAB2 STAB2 Note 1.

ZP

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

AC Servo Motor Driver (Network card type ）

PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

HRX-OM-Q026

sensor failure AL28 Pump maintenance AL29 Fan maintenance10 AL30 Compressor maintenance AL31 Contact input 1 signal detection AL32 Contact input 2 signal detection Compressor AL37 discharge temp. sensor failure AL38 Compressor discharge temp. rise 9: Default value when AS11 is set to either A.STP or A.RUN. 10: Water-cooled type model does not generate this alarm. 11: AL.08 and AL.09

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

ZP

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

SQ1000/2000

rail mount type Direct mount type Nil E 2A 4 1 12 12 stations SSQ2000 41 PL26 PL20 JL20 S Manifold mounting AXT100 03 DIN rail mount type Direct mount type Nil E Wiring Stations Note) S D Single wiring Double wiring SSQ2000 PR 4 C10 Note) PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09

Table of Contents

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

Mechanically Jointed Rodless Cylinder Series MY1

head taper plug) VV VV Centralized piping type S 1.1 WX D Bottom ported (ZZ) (Applicable O-ring) 2 x d Y B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 HH 40.5 50 63.5 J M6 x 1 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MM MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 A 120 150 180 Bore size (mm) 25 32 40 09

ZP

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

ZP

/Type Bellows Pad J: Bellows (Multistage type) 6, 9, 10, 14, 15, 16, 25, 30 Pad diameter For use where there is no space for the buffer (spring type) How to Order ZP2 X19 06 J N Pad unit Work pieces with inclined adsorption surface Pad diameter Pad material Symbol Pad diameter Blast type Symbol Material NBR Silicone rubber Urethane rubber FKM Conductive NBR Conductive silicone rubber 06 09

A

12.4 RBQC32C 6.6 13.1 14.4 H O W T O O R D E R S H O C K A B S O R B E R S E R I E S RBQ O P T I O N S T O P P E R N U T RBQ M O D E L Parts No B C S MM RBQ16S 22 25.4 12 M16x1.5 RBQ20S 27 31.2 16 M20x1.5 RBQ25S 32 37 18 M25x1.5 RBQ30S 41 47.3 20 M30x1.5 RBQ32S 41 47.3 25 M32x1.5 Basic Type C With Damper OD T H R E A D 16 20 25 30 32 D I M E N S I O N S S E R I E S RBQ S T R O K E 04 07 08 09

smcmaintenancepartslist

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2