SMC Corporation of America
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Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size

Applicable Model/Drain Capacity Model AF10 AF30 AF40 AF40-06 AF20 AF50 3/4, 1 AF60 Port size M5 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 1 Drain capacity (cm3) 88 9 19 43 Note) Please consult with SMC for dimensions. 30 AF X64 03 Long bowl Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Stations L1 L2 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 7 86 80 8 96.5 90.5 9 107 101 10 117.5 111.5 3 44 38 4 54.5 48.5 5 65 59 6 75.5 69.5 2 stations 33.5 27.5 20 stations 222.5 216.5 645 Series 10-V100 Specific Product Precautions 1 Be sure to read before handling.

Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19

(Page 14) 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N ITV-IL 0x0013 (19) 0 R Product ID N ITV-IL 0x0014 (20) 0 R Product Text N IO-Link/Electro Pneumatic Regulator 0x0015 (21) 0 R Serial Number N "x" *3 0x0016 (22) 0 R Hardware Revision N HW-Vx.y *4 0x0017 (23) 0 R Software Revision N FW-Vx.y *4 0x0018 (24) 0

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

It may cause electric shock or accident. 19 - 7-2. How to maintain electrode needles 7-2-1. Cleaning of electrode needles 1) Disconnect the power supply cable. 2) Rotate the locked knob and pull down the cartridge. 3) Clean electrode needles. 4) Mount the cartridge and power supply cable in the reverse order to complete the cleaning.

13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings

Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11. Dimensions 24 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

No.EX-OMN0029CN-D TMSI DeviceNet // EX600-SDN#A EX600-ED# 3 9 10 12 12 15 15 17 SI 18 18 19 19 20 LED 25 27 27 28 29 29 30 30 31 31 31 -1No.EX-OMN0029CN-D 33 34 43 43 54 EDS 54 TM 55 RSNetWorx for DeviceNet 59 60 63 TM 65 DeviceNet 77 -2No.EX-OMN0029CN-D *1) (ISO/IEC)(JIS) *2) *1) ISO 4414 Pneumatic fluid power -General rules relating to systems ISO 4413

pulse output Accumulated pulse output Output 2 Switch output Switch output Shipment 16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19

D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W. D-F7BWV D-F7PW D-F79W. D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL oiagnoslic ouipui OUT 2 o o Series NCDQT Auta-Switch / Operating Range D-A72.

Brass 12 12 Tube assembly Stainless steel Carbon steel Hexagon socket head cap screw (with SW) 13 13 Nut Armature assembly Brass 14 14 Rubber mount Return spring NBR Stainless steel 15 15 DIN connector type solenoid coil Tube assembly Stainless steel 16 16 Clip Nut Stainless steel Brass 17 17 DIN terminal gasket Rubber mount CR NBR 18 18 DIN connector DIN connector type solenoid coil 19

133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions g Grommet h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5500 VEX5501 19

HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings

) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

No.D-S-OMB0023-C PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-S9### D-T99### D-S7### D-T79### Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 11 Definition and terminology 11 Mounting and Installation 12 Installation 12 Circuit diagram 14 Troubleshooting 15 Specifications 19 Dimensions 20 -1No.D-S-OMB0023-C Safety

Construction / Parts list, seal list Double acting/ Finger open Single acting / Normal open Single acting / Normal close Double acting / Finger close 5 4 12 7 1 9 10 8 16 15 14 3 2 21 11 18 19 13 20 6 17 Components No. Description Material Remarks Components 12 Needle roller High carbon chromium No.