Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Heat Resistant 2-Color Indicator

INFORMATION Heat Resistant 2-Color Indicator Solid State Auto Switch Direct Mounting Type RoHS Heat resistant (Max. 302F [150C]) type added to the D-M9 compact auto switch.

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

CYV

size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid Double acting Action 0.5 MPa Proof pressure 0.05 to 0.3 MPa Operating pressure range 1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) Leakage Maximum baking temperature 150C

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Selectable mounting

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

VBA-OM-P019

T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/4 1/4 VBA2/VBA4 TSG R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3

VBA-OM-S007

4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Rc1/4 477 429.8 527 479.8 481 531 206 674 520 256 824 570 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 2010 SMC Corporation All Rights Reserve IN (I) URL http://www.smcworld.com VBAT20S1 VBA40A VBA42A VBAT38S1 VBA40A VBA42A VBA20A VBA22A VBA20A VBA22A VBA4 VBA2 2 () OUT OUT OUT IN OUT IN :VBA2 8VBA4 8 10 O : IN VBA2 22~24Nm(R3

VBA-OM-P018

VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3

VBA-OM-S006

Chiyoda-ku, Tokyo 101-0021 JAPAN 417 367 VBA11A 391 328 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 180 460 454 2010 SMC Corporation All Rights Reserve Rc1/4 URL http://www.smcworld.com Rc3/8 VBAT05S1 VBA10A VBAT10S1 VBA20A VBA22A VBA10A VBAT10S1-VBA2 IN OUT VBA2 VBAT05S1VBAT10S1VBA2 OUT VBA1 2 () VBA1 IN OUT OUT OUT VBA1 OUT IN IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C

male branch tee, straight union, union tee, bulkhead union, union elbow, swivel elbow and female connector options, the KFG2 fittings can accommodate tube sizes from 4mm to 16mm and 1/8" to 1/2" with port sized thread connections from R1/8 to R1/2 and 1/8NPT to 1/2NPT.Stainless steel 316 inch size insert fitting, Connection thread: NPT, Fluid temperature: -65 to 260C (swivel elbow -5 to 150C