P

14.7 19.5 3.8 Deep style (D) ZP10Dl to 40Dl Model Nom.size U02 A 2 B 2.6 C 1.2 D 7 E F 12 Y 0.8 _ _ _ _ ZP02Ul ZP04Ul ZP06Ul ZP08Ul ZP10Ul ZP13Ul ZP16Ul ZP20Ul ZP25Ul ZP32Ul ZP40Ul ZP50Ul U04 4 4.8 1.6 7 12 0.8 U06 6 7 2.5 7 12 0.8 U08 8 9 2.5 7 12 1 U10 10 12 4 13 7.7 12 3 U13 13 15 4 13 7.7 12 3 U16 16 18 4 13 8.2 12.5 3.5 U20 20 23 4 15 9.5 14 4 U25 25 28 4 15 9.5 14 4 U32 32 35 4 15

Vacuum Equipment

(Sequence in selection graph (4), ) T2: 12 seconds.

VQ

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser t Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-11 12 Series ZYY/ZYX Exhaust Characteristics/Flow Characteristics The flow rate characteristics correspond to a supply pressure of 0.45 MPa.

pa

Heavy-duty cord can be used up to the cable O.D. 6 to 12. Use the tightening torques below for each section.

PF2D

2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

PSE530/200

Repeat the same setting steps for CH2 to CH4. 16-3-12 12 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 2: Pressure Setting Manual setting Channel selection Output mode MPa Measuring mode Hysteresis mode: Hysteresis of the switch output can be set arbitrarily.

Manifold Specifications

Flat Ribbon Cable Type 21P Applicable solenoid valve How to Order 1 3 5 6 4(A), 2(B) port Stations VV4Z1 05 21P VZ1120MOZ-M5 Applicable blanking plate assembly DXT170-25-3A Applicable connector assembly DXT170-127-A 1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

Thread type M5 x 0.8 Rc NPT G 12, 16 Nil TN TF 20 to 100 Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

12 V 2-wire Reed switch Solid state switch REC Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire IC circuit Diagnostic indication (2-color indication) Relay, PLC CY 24V Yes CX Grommet IC circuit Water resistant (2-color indication) IC circuit MQ 5 V, 12 V With diagnostic output (2-color indication) 2-wire (Non-polar) Magnetic

CH

M9NW M9PW M9BW M9NA1 3-wire (NPN) Diagnostic indication (2-color indicator) 5 V, 12 V 12 V Relay PLC 24 V IC circuit 3-wire (PNP) 2-wire Yes Grommet 3-wire (NPN) 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PA1 M9PAV1 3-wire (PNP) 2-wire 4-wire M9BA1 M9BAV1 12 V 5 V, 12 V F79F IC circuit Diagnostic output (2-color indicator) A96V A72 A93V2 A96 A72H A93 A90 Relay PLC 5 V IC

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

V 12 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PA1 M9PAV1 M9BA1 M9BAV1 12 V 3-wire (NPN equivalent) Grommet 24 V A96 A96V 5 V IC circuit Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1Water resistant type auto switches can be mounted

Angular Style Air Gripper Standard Type Series MHC2 Size: 10, 16, 20, 25 2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 12-1-4 to 12-1-6 for Precautions on every series. Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color indicator) Grommet Yes 3-wire (Equiv. to NPN) 5 V A96V A96

RLQ

V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet Solid state switch Reed switch 12 V 2-wire Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire Diagnostic indication (2-color display) Relay PLC IC circuit 24 V Yes Grommet Water resistant (2-color display) IC circuit IC circuit 5 V, 12 V With diagnostic output (2-color display

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

switch 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V 2-wire J79C Connector M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V Yes Grommet Water resistance (2-color indication) IC circuit F79F IC circuit 5 V,12 V With diagnostic output (2-color indication) 3-wire (NPN

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

to 24 VDCp10% 12 to 24 VDCp10% (25C reference) characteristics p3%F.S.(15 to 35oC) p2%F.S.

Modular F.R.L. Units

Note 10) Standard material (polycarbonate) Note 11) Without a valve function Note 12) For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.)