VER2000/4000

P A (Supply air) B R2 (Exhaust air) A (PA Setting) B R2 (Exhaust air) Thereafter F1 = F2: See figure w. 14-9-19 4 Series VER2000/4000 CurrentPressure Characteristics Selecting Electro-pneumatic Proportional Valve How to Find the Flow Rate Air temperature of 20C The horizontal axis of the characteristics represents the output amperage of the power amplifier VEA25.

VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

PFxx-OMP0001CN

48No.PF-OMP0001CN-F [F81] 55 <> [F81] [F81][Pin] [Pin][] [F81] -49No.PF-OMP0001CN-F [F90] <> [F90] [F90][ALL] [ALL][] [oFF] [on] "" 2 [F90] -50No.PF-OMP0001CN-F 1 [rEF] 2 [Uni] 3 [oU1] OUT1 4 [1ot] OUT1 5 [ ] OUT1 6 [ ] OUT1 7 [CoL] OUT1 8 [oU2] OUT2 9 [2ot] OUT2 NPN2PNP2 10 [ ] OUT2 11 [ ] OUT2 12 [rES] 13 [FLo] 14 [rEv] 15 [inP] 16 [FrE] 17 [SAv] 18 [PoS] 19

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

as grommet type. 4-3-8 Series SY100 Base Mounted (With sub-plate) Grommet (G), (H): SY1 4(A)-M3 1 2 G H 15.6 Manual override 9 (Light/Surge voltage suppressor) 5 V100 + 13 15.5 SY P SYJ 2-2.6 (Mounting hole) 13 3 28 (For DC) VK 34.5 (For AC) VZ VT G: 300 H: 600 (Lead wire length) G, H: 26.1 G, H: 26.8 (For DC) VP 10 VG VP 27.8 (For AC) S070 25.3 21.2 VQ 9 6 A R VKF 5.5 3 3 9.5 5 4 VQZ 19

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

Modular F.R.L. Unit

E Octagon Port size C T-interface B F.R.L. body center D A Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable models AC10, AC10B AC20, AC20B AR20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C C 12 D 14 E 8 B 19 A 11 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Mounting-Caution

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

IZx-OMT0049

) Note 19) Note 19) Note 19) OFF Generate Ion generating status Note 21) Note 21) Note 21) Stop Note 12) It takes 3 seconds to operate after the power is on.

NCA1

Please See Below for How to Order Piston Rod Assembly 19 Wear Ring Resin Available only as an Assembled Item. Please See Below for How to Order Piston Rod Assembly JM-10 JM-045 JM-045 JM-10 20 Jam Nut Carbon steel * Components included in a seal kit.

2/3 Port Valve

Refer p.4.1-18, 4.1-19 for specifications and models.

Fieldbus system EtherCAT compatible SI Unit

VDC. 17 Power supply voltage level for output is below 19 VDC. 18 19 Disconnection between the units.

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

8. 18 Cylinder tube gasket NBR 2 19 Bumper Urethane 2 20 Rod end nut Rolled steel 1 Trivalent zinc chromated 21 Magnet (1) * Seal kits consist of items !4 to !6, !8 and can be ordered by using the seal kit number corresponding to each bore size. * The seal kit includes a grease pack (10 g for 32 to 50, 20 g for 63 and 80, 30 g for 100).

Thermo-chiller

1 CH1 Circulating fluid outlet Applicable hose I.D.: 19: HRL-BP001 Applicable hose I.D.: 15: HRL-BP002 e q (261) Parts List No.

45

Note 19 Orange Black 20 Red White Hirose Electric Co., Ltd. Fujitsu Limited Japan Aviation Electronics Industry, Ltd. J.S.T.

Vacuum Unit Ejector / Vacuum Pump System

Single unit / Manifold: Option (D) Manifold: Option (P) C Vacuum pump system PE port female thread specification(M3) Note 18) D With individual release pressure supply (PD) port(M3) Note 19) Use when supply pressure for vacuum release is individually requested.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

DXT156-19-1A 1 pc.

Electric Actuators

2 Step motor (Servo/24VDC) 16 17 Series LEPS Electric Actuator/Miniature Slide Table Type Dimensions LEPY LEPS LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEPS6 D C B A 3.5 4 5.2 19 ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 4 x M4 x 0.7 thread depth 6 20 11 19 J 25 11 Table operating range Note 1) Motor cable

Electric Actuator

For auto switches, refer to pages 19, 20.