SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

IR1200-A/2200-A/3200-A Series high-flow-rate regulator that handles up to about twice the flow rate of conventional products.Features · Air consumption: 0 bleed air.· Lightweight type with approximately 27% weight reduction.· Repeatability: ±1% (full span).

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Panel

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Restrictor Installed Fitting

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Restrictor Installed Fitting

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Wetted Parts: Stainless Steel 316L