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industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 4/11 FGX-OM-L007-C / 1 1.5 () 5/11 FGX-OM-L007-C FGD Series FGD , 0.5MPa 4080 oC 40 oC IN/OUT 0.1MPa , U IN/OUT 6/11 FGX-OM-L007-C 1. 1-1. 1 2 (1) 3 (2) 4 (3) (4) 5 (5) 6 (6) 7 (7) 8 (8) 9 (9) (10) (2 FGD*B ) 10 (11) (12) 18 (13) (14) 11 (15) (16) (17

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

Warning Warning Recommended Tightening Torpue Unit: Nm Connection thread M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Torpue 1to1.5*1 3 to 5 8to12 15to20 20to25 28to30 36to38 40to42 48to50 48to50 *1 After tightening by hand, use a tightening tool to tighten an additional 1/6 to 1/4 turn as a guideline. Caution Caution Mounting 1.

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: General rules for pneumatic equipment.

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o

face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld 3/4 inch face seal (Female) 3/4 inch face seal (Male) 3/4 inch tube weld Code Purge port 1) TW6 FV8 MV8 TW8 FV12 MV12 TW12 q Inlete None Available None Available Outletr None None Available Available Code 00 M0 0B MB w e r 1) 1/4 inch face seal (Male) as standard.

thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: Pneumatic fluid power General rules relating to systems JIS B 8361: Hydraulic fluid power General rules relating to systems JIS B 9960-1: Safety of machinery Electrical equipments of machines (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc/ *2) Labor Safety

Throttle Main valve Valve 1 Valve 2 Soft start-up valve: ON Valve 1, Valve 2: ON P2 1/2P1 Soft start-up valve Start supplying flow adjusted air with the throt tle by energizing valve 1 and valve 2. 1(P) 2(A) VP544-X555 P1 Soft start-up valve : OFF Valve 1, Valve 2: ON Soft start-up valve 0 Time 1 3(R) 3(R) Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/Residual Pressure Release

Throttle Main valve Valve 1 Valve 2 Soft start-up valve: ON Valve 1, Valve 2: ON P2 1/2P1 Soft start-up valve 1(P) Start supplying flow adjusted air with the throttle by energizing valve 1 and valve 2. 2(A) VP544-X555 P1 Soft start-up valve : OFF Valve 1, Valve 2: ON Soft start-up valve 0 Time 3(R) 3(R) 1 Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/Residual Pressure Release

A,B),25(A) has magnets on both sides. 10 Rod cover Aluminum alloy Anodized Stainless steel (MXQ6(A,B)) 11 Seal support Brass (MXQ8(A,B,C),12(A,B,C)) Electroless nickel plating (MXQ8(A,B,C),12(A,B,C)) Aluminum alloy (MXQ16(A,B),20(A,B),25(A)) Chromate treatment(MXQ16(A,B),20(A,B),25(A)) 12 Head cap Aluminum alloy Anodized 13 Floating bushing Stainless steel 14 Floating bushing Stainless steel