High Vacuum Angle Valve

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Table of Contents

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

CQ2

l X 140 l M6 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 120 l X 145 l M8 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 125 l X 150 l M10 X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 130 l X 155 l M10 X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 100 l X 105 l X 140 l X 165 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3

CL

11 11 14 17 17 M10 X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129 140 6

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) Size L2 Y L4 max. (mm) E3 = E1 = Y = Size X L3 max.

Battery-less

torque > Ts Effective torque > Tf x 1.5 Effective torque > Ta x 1.5 10 Effective torque: T [Nm] LER 50EK High torque 8 w Check the effective torque Confirm whether it is possible to control the speed based on the effective torque corresponding with the angular speed while referencing the (Effective TorqueAngular Speed graph). 6 Selection example 4 Inertial load: Ta Ta x 1.5 = I x x

REA/REB

D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Smooth Cylinder/Low Speed Cylinder

Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (mm) Y 7 7 8 8.5 11 13 14 16 X 15 15 16 16.5 22 22 28.5 30 W 10 10 10 10 17.5 17.5 20 20 M 3 3.5 3.5 4 5 5 5 7 LZ 44 49 58 71 86 106 125 150 LX 32 36 44 54 66 82 100 120 LT 3 3 3 3 4.5 4.5 4.5 6 LS 53 53 53 60 67 67 74

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

ISO Cylinder

(With mounting bracket) Single foot: Cl75KEl lTL/Flange: Cl75KEl lTG LT (W + Stroke) NH NH LT LT 2 x AB (XS + Stroke) (With mounting bracket) Double foot: Cl75KEl lTM 4 x 8 x FD LT (W + Stroke) TF UR 4 x AB AV US TR (XL + 2 x Stroke) LS + Stroke AO [mm] Bore size AB AO AV FD LS LT NH TF TR UR US (W) (XL) (XS) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

for D, Y, DO, YO or W types.

CV/MVGQ

1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 30 35 35 40 40 44 52 64 78 92 86 83 83 84 85 27 32 32 37 37 16 20 20 25 30 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 85 102 116 32 40 40 52 52 27 30 31 37 40 10 10 10 14 14 84 90 98 116 126 65 75 90 110 130 8 11 11 13 16 Without rod boot H 51 58 58 71 72 Bore size (mm) With rod boot e 43 52 52 65 65 TDe8 TI TQ TT TX TY TZ W I Q l 1/4 stroke

CV/MVGQ

1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 19.4 16.4 18.4 21.4 21.4 14 18 18 22 26 147 157 173 189 203 27 30 31 37 40 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 MK(2) RS Q G Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 201 208 217 245 253 W RS H A l 1

Hydraulic

x 115l x 140l x 165l M5 x 70l 100D (M) CHQWB32 5D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l x 195l CHQWB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

Air Cylinder

CA2 Bore size MM NA P S TA TC** ZZ WA W WH 20 M8 x 1.25 24 M5 x 0.8 77 11 M5 x 0.8 147 16 25 1.5 25 M10 x 1.25 29 M5 x 0.8 77 11 M6 x 0.75 157 16 25 1.5 32 M10 x 1.25 35.5 Rc1/8 79 11 M8 x 1.0 159 16 25 1.5 40 M14 x 1.5 44 Rc1/8 87 12 M10 x 1.25 187 17 20 1.5 50 M18 x 1.5 55 Rc1/4 102 13 M12 x 1.25 218 18 20 3 63 M18 x 1.5 69 Rc1/4 102 13 M14 x 1.5 218 18 20 3 80 M22 x 1.5 86 Rc3/8 122

MY1

Horizontal mounting y P. 8-11-6 x y W: Workpiece (2 kg) x z 3. Ceiling mounting 4.

ZP

Calculation D n W P t : Pad diameter (mm) : Number of pads used : Lifting force (N) : Stable vacuum pressure (kPa) : Safety factor: Horizontal pad contact: 4 (dynamic) Vertical pad contact: 8 (dynamic) Pad W D = 3.14 x P x n x t x 1000 4 1 W W Horizontal lifting Vertical lifting Basically avoid this use. ( ) Selection Graph The pad diameter required for horizontal (selection graphs (1) and