Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Support Guide/11-LEFG Series

B side LES LEPY LEPS q 0.08 C side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40

1.63

10 100 -X Eccentric distance L (mm) 507 MGPW Series L L m m Horizontal Mounting Slide bearing MGPWM20 to 63 (17) L = 50 mm, V = 200 mm/s or less (18) L = 100 mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V

S070

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Thermo-chiller

Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon

15

Allowable load mass on guides/Allowable moment w 3 Table 4.

Slider Type Ball Screw Drive/11-LEFS Series

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

VP300/500/700

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

TABLE OF CONTENTS

V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB (G or L) LW53GJ8XGB (G or L) LW53GV8XGB (G or L) LW53GK8XGB (G or L) LW53HH8XGB (G or L) LW53HJ8XGB (G or L) LW53HV8XGB (G or L) LW53HK8XGB (G or L) LW53JJ8XGB (G or L) LW53JV8XGB (G or L) LW53JK8XGB (G or L) LW53VV8XGB (G or L) LW53VK8XGB

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

VQ4000

Electrical entry of manifold (except L and C kit) is individual wiring. For details, refer to internal wiring figure of each kit. Cable length is 0.6 m for L kit.