Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

MG

-www.stevenengineering.com 16 16 12 12 1 1 0.1 0.1 10 50 100 200 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 50 50 10 10 40 Load weight m (kg) 40 Load weight m (kg) 5 5 32 32 25 25 20 1 20 1 16 16 12 12 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric

CA2

12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (Different sides and same side) 1 20

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Cylinder with Lock

R1 S5 XD Z 32 E5032 32 10 11 47 26 0.2 0.6 21 18 31 8 38 51 7 10 10 6.6 200 222 40 E5040 36 12 11 54 28 0.2 0.6 24 22 35 10 41 54 9 10 11 6.6 226 250 50 E5050 45 12 15 66 32 0.2 0.6 33 30 45 12 50 65 11 12 12 9 245 277 63 E5063 50 16 15 77 40 0.2 0.6 37 35 50 12 52 67 11 14 15 9 269.5 301.5 80 E5080 63 16 18 99 50 0.2 0.6 47 40 60 14 66 86 12.5 18 15 11 320 360 100 E5100 71 20 18 118 60 0.2

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

NCA1

8 3 1/4 8 7/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7

Air Cylinder NCA1 Series

10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

C95

See page 6-12-10 for dimensions. See page 6-12-10 for dimensions.

MY1

MY1B10 (mm) FC Applicable bore size E EA EB EC EY h TT F FB FH FW S T W a Shock absorber model MY1B10 10 5 28 5.5 29.8 8 1.8 40.8 5 5 (Max. 10) 35 RB0805 3.5 MY1B20 RB2015 RB2015 RB1412 RB1007 7 12 20 20 25 31 10 10 12 15 49 57 74 82 6.5 8.5 11.5 12 47.5 57.5 73 87 60 70 90 100 8 8 6 6 33 12 46 13 17 22 22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 15 15 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

0.4

C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

One-touch Fittings

[mm] Weight [g] X (X) Y Nylon Urethane *1 D D Applicable tubing Oval type Round type 4 1/8 KQ2H04-01GS1 10 10 7.7 10 14.3 11.2 13.3 4.8 3.4 3 5.6 1/4 KQ2H04-02GS1 14 14 7.7 10 16.7 12 13.3 4.8 3.4 3 14.6 8 to 16 4, 6 6 1/8 KQ2H06-01GS1 10 9.9 9.7 12 18.4 15.3 13.3 13.1 10.4 4.5 5.8 1/4 KQ2H06-02GS1 14 14 9.7 12 16.7 12 13.3 13.1 10.4 4.5 12.5 3/8 KQ2H06-03GS1 17 17 9.7 12 18.1 13 13.3 13.1

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

10

12 12 12.5 12.5 17.5 17.5 6 6 10 10 6 6 9.5 9.5 11.5 11.5 9 9 Models with rubber bumper have different dimensions for auto switch proper mounting positions (A and B).

MY1

side M4 x 0.7 depth 7 4-M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 depth of counter bore 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 10 Mechanically Jointed