High Power Cylinder Series RHC

D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5NTL Solid state D-A33, D-A34, D-A4 Reed BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-G39, D-K39 Solid state 2 Series RHC Theoretical Output Table

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCHIS10M-20-1-D to IS10M-60-1-D Model IS10M-20-1-D A B C D 10.6 83.8 66.3 42 12.6 91.8 70.3 53 14.6 97.8 72.3 58.6 16.6 100.8 73.8 59.3 22 110.8 78.8 90 IS10M-30-1-D IS10M-40-1-D IS10M-50-1-D IS10M-60-1-D -19- 11-3.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

EX120/121/122

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

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d * i : , : r . i 1 : Manifold EX250 Serial Wiring with InpuVOutput Unit .

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

High Power Cylinder:

D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-040 BMA2-025 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state Reed Solid state D-B53, D-B54, D-B64, D-B59W D-G5NTL BA-32 BA-04 BA-01 BA-02 Reed Solid state D-A33, D-A34, D-A4 D-G39, D-K39 BD1-02M BD1-02 BD1-04M Precautions Be sure to read before handling.

ALF400 to 900, ALT-5/-9

1 1 4 / 1 1 0 0 9 F L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Soft start up valve with lock out

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil B A 3(R) DZ 1/2 (AVL4000) 04 G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

Related Products

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil 3(R) DZ 1/2 (AVL4000) 04 B A G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

MICRO MIST SEPARATOR

AF-OMR0021-C PRODUCT NAME MICRO MIST SEPARATOR MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

L8 3 2 B4 1 B6 Stations B8 D side LM Note 1) For CM, indicate in the specification table. Note 2) Inch sizes use the following symbols. N3: 5/32 N7: 1/4 N9: 5/16 NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. Note) Stations are counted starting from station 1 on the D side. 2.