5 Port Solenoid Valve Series VQZ1000/2000/3000

Note 2) Standard lead wire length: 300 mm High speed response/ External pilot type BR Note 1, 2) (0.9 W) High pressure/External pilot type (Metal seal type only) KR Note 1, 2) (0.9 W) Coil voltage 1 2 3 4 5 6 IP65 compliant 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note 1) Option Note 2) For details on external pilot type

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

9 @0 50 20 25 32 40 63 Description Material 16 Qty. 1 1 2 2 2 2 2 4 2 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring Side seal assembly Special resin MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke MY16-16A-Stroke Stainless steel NBR NBR NBR NBR NBR NBR MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil rated voltage VP7 1 2 3 4 5 6 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC VP4 VQ VQ4 Wiring Specifications VQZ The lead wires are connected to the valve as shown below. Connect each to the power supply side.

IDU/IDF

E Q P N M L K J I H G F D C B A Port size Model 71 50 90 700 700 600 356 328 398 219 642 63 445 70 1235 1155 750 300 R 1 IDU22C1/22C 112 50 90 780 776 680 416 388 463 269 722 68 550 136 1350 1260 830 360 R 1 1/2 IDU37C1/37C 87 50 95 800 800 700 461 433 508 267 722 68 530 155 1440 1340 850 405 R 2 IDU55C 87 50 95 800 800 700 481 453 528 317 722 68 530 220 1575 1475 850 425 R 2 IDU75C : Power

Single Axis Electric Actuator Series LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15

0.

Yes Coil voltage None 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Yes Yes (Without light) Note 1) Standard lead wire length: 300 mm Note 2) For AC voltage valves there is no S option.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

kPa 30 kPa 30 kPa 0 kPa 6 0 kPa 50 kPa 50 kPa 4 70 kPa 2 0 0 0.2 0.6 0.4 0.8 1.0 Flow [L/min] Flow [L/min] PF2M705(-L) 5 L/min PF2M710(-L) 10 L/min 10 20 Pressure loss [kPa] Pressure loss [kPa] 350 kPa 750 kPa 8 30 kPa 15 350 kPa 70 kPa 750 kPa 50 kPa 6 0 kPa 10 4 30 kPa 50 kPa 5 2 70 kPa 0 kPa 0 0 2 4 6 8 10 0 0 1.0 3.0 2.0 4.0 5.0 Flow [L/min] Flow [L/min] PF2M725(-L) 25 L/min PF2M750(

VQ7-6/7-8

1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port) 25 25 (R1, R2) 2-3/8 P R2 R1 VK A B 14 11 VZ 38 50 62 50 62 A 12 9 VF R2 R1 P (L 500) Cable with connector B A 2-1/8 13 13 VFR Mounting hole 2-6.5 42.5 42.5

VQ7-6/7-8

center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B 62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5

MK

2 !3 25, 25: 2 Qty.

Compact Guide Cylinder

When used as a stopper, select a model with a stroke of 50 mm or less. 2.

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

MU

, Spring extend Single acting 40 50 63 7-8-1 2 Series MU Precautions Rod End Allowable Load Be sure to read before handling.

Environment

How to Order R 6N 1 1 D B 25 50 LEY X5 o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: K (mm) CRB2 L3 max X W1 L1 max (mm) Shaft type CRBU2 Y W2 L2 max L4 max Size J K T J K T J K T J K T W1 = L3 = L1 = Size 50 50 11.5 to 39.5 1 to 6 1 to 6 Y-3 L2-2 11.5 to 39.5 L1-2 X-3 L4 = CRB1 L2 = Y = 63 63 12.5 to 45 1 to 7.5 1 to 7.5 Y-3 L2-2 12.5 to 45 L1-2 X-3 80 80 13.5 to 53.5 1 to 8.5 1 to 8.5 Y-3 L2-2 13.5 to 53.5 L1-2 X-3 X = MSU 100 100 18.5 to 65 1 to

MHZ

of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.