3 Port Solenoid Valve

2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

CE2

w e r t y u i o !

CE2

w e r t y u i o !

Cylinder with Lock

er uy q !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Compact Type

8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Compact Type Dual-Rod Cylinder Series CXSJ

8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

When the inlet pressure (P1) is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1). When the inlet pressure (P1) is shut off and released, the check valve w opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2).

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Series VCL

terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Non-contact Gripper

e w A A-A e r q w Component Parts No.

Air Slide Table Series MXS

D-X Individual -X 73 Series MXS Construction y u i o w e !8 !9 !5 !7 q !1 !0 !6 !2 !3 !

Series VS

4 4 4 4 U T X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S A 177.5 B 119 C 9 D 50.5 105 H 20.5 I J 58.5 F 108 96.5 87 G K L M N 22 79.5 52.5 48.5 E O P 52 T 26.5 26 41 28 20.5 18 58.5 45.5 64.5 58.5 30.5 20.5 SIZE 3 SIZE 2 SIZE 1 234.5 189.5 142.5 125 13 9 77.5 52 52 34 112 123.5 41 26 52 37 31.5 92 64.5 92 121 97.5 67.5 82.5 69 74 58.5 4 3 36 U 1.5 73 68.5 V 57.5 W 43 35 30 X 25 CC Y 42 2 2 2 Z

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Speed Controller with

Construction L-Bracket w e r t w e r t q Component Parts No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q o !0 !1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

Large Size Vacuum Module: Series ZR

0 q y t !2 u w e r i Component Parts No. Description Manifold base Material Aluminum Stainless steel PBT PBT Polycarbonate Part Model Material Part Model No. Description 8 9 10 Refer to Table (2) on page 944-1.

High-Precision Digital Pressure Switch

w e r t y u i q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.