EtherNet/IP TM Compatible Fieldbus System

IN29 IN28 IN27 IN26 IN25 IN24 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 COM B 2 IN47 IN46 IN45 IN44 IN43 IN42 IN41 IN40 IN39 IN38 IN37 IN36 IN35 IN34 IN33 IN32 COM C 3 IN63 IN62 IN61 IN60 IN59 IN58 IN57 IN56 IN55 IN54 IN53 IN52 IN51 IN50 IN49 IN48 COM D 4 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 Reserved 5 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 Reserved 6 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 Reserved 7 0 0 0 0

CL

0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

EXxx-OMK0006

Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.

LJ1H

100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs above, be sure to use a regenerative absorption unit.

1

3.5 +0.013 +0.001 3.5 2.8 0.5 6 16 0.1 4 M3 x 0.5 4 3.5 1 3 5.5 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.75 +0.1 0 +0.2 0 0.05 0.15 0 0.2 +0.2 0 6 6 5.5 1.25 4.5 6.5 8 5 6.5 5 CXS10 5 3.2 1 C0.5 3.5 20 0.1 +0.016 +0.001 M5 x 0.8 M3 x 0.5 4 +0.2 0 +0.2 0 0 0.2 0.05 0.15 +0.3 0 8 8 7.5 2 5 9.5 8 7 8 6 CXS15 +0.016 +0.001 6 5.2 1.5 C0.5 5.5 25 0.1 M6 x 1.0 M5 x 0.8 5 3 +0.3 0 0 0.2 +0.2 0 +0.2 0 CXS20

Combination Cylinder

0 0 0 234 261 280 327 356 242 269 288 336 365 Clevis pin, flat washer and cotter pin are packed.

Digital Flow Switch (Integrated display type)

2 L 0.0005 0 5 L 0.00125 0 L/min 10 L 0.0025 0 25 L 0.00625 0 50 L 0.0125 0 100 L 0.025 0 PF2M7 1 L 0.0088275 0 Cfm x 10-3 2 L 0.0176575 0 5 L 0.04415 0 10 L 0.088275 0 cfm 25 L 0.000220725 0 50 L 0.0004415 0 100 L 0.00088275 0 -74No.PF-OMW0007-E [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2M7 series, unit L/min, flow range 25 L and PD =

Basic type / Direct mount type Series CY3B/CY3R

0!2!6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Compact Cylinder

21 IY-G02 +0.4 +0.2 +0.058 0 l20 22 28 38 44 +0.058 0 10 M10 x 1.25 10.5 16 20 23 24 M10 x 1.25 25.6 20 12.8 12 16 21 24 IY-G03 +0.4 +0.2 +0.058 0 +0.058 0 M14 x 1.5 M14 x 1.5 10 41.6 36 IY-G04 +0.5 +0.3 +0.058 0 +0.070 0 50.6 M18 x 1.5 M18 x 1.5 14 44 IY-G05 +0.5 +0.3 +0.070 0 +0.070 0 64 M22 x 1.5 M22 x 1.5 18 56 IY-G08 +0.5 +0.3 +0.070 0 +0.084 0 72 M26 x 1.5 M26 x 1.5 22 64 IY-G10 +0.5

SI Unit for Vacuum Manifold

0 0 0 0 0 1 1 0 Select CH6 for PressureValueMonitoring 0 0 0 0 0 1 1 1 Select CH7 for PressureValueMonitoring 0 0 0 0 0 1 0 0 0 Select CH8 for PressureValueMonitoring 0 0 0 0 1 0 0 1 Select CH9 for PressureValueMonitoring 0 0 0 0 1 0 1 0 Select CH10 for PressureValueMonitoring 0 0 0 0 1 0 1 1 Select CH11 for PressureValueMonitoring 0 0 0 0 1 1 0 0 Select CH12 for PressureValueMonitoring

CQ2

0 !1 !2 !3 !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8: 0/16 SDN1: 0/32 SDN3: 0/16 SDN2: 0/32 SDN4: 0/16 EX260 SY SV VQC S0700 125 k/250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage

AC Servo Motor Driver (Pulse input type)

AL.9F Battery warning AL.10 0 1 0 Undervoltage AL.E0 Excessive regeneration AL.12 0 0 0 Memory error 1 (RAM) warning AL.13 0 0 0 Clock error AL.E1 Overload warning 1 Warnings AL.15 0 0 0 Memory error 2 (EEP-ROM) AL.E3 Absolute position counter AL.16 1 1 0 Encoder error 1 warning (At power on) AL.E5 ABS time-out warning AL.17 0 0 0 Board error AL.E6 Servo emergency stop AL.19 0 0 0 Memory

ITV

Output pressure (kPa) G 20 0.5 0.5 Return PPA 40 0 0 Out AL 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (% F.S.) Input signal (% F.S.)

IIIIIII

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

Mechanical Valves Series NVM, NVFM, NVZNI

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

ZP

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Proposals for Energy Saving

Flow coefficient Port size Rc Proof pressure MPa Max. system pressure MPa Max. operating pressure differential MPa Weight g Orifice mm Cv Effective area mm Model N.C. 1/8 (6A) 2 0 VXA213 2 0 VXA212 2 0 VXA213 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA226 2 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 11 6 170 0.5 1.0 0.6 0.2 0.1 1.0

Table of Contents

0 !1 Drain q r e w t i u y o !0 !