0.4

F 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F

VT307

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

Fieldbus System

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

4

Exhaust port type 2 3 Common exhaust Individual exhaust Ordering example: VV307-01-052-01-F 1 pc. (5 station manifolds base) VO307-1G14 pcs. DXT060-51-13A1 pc.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

Gun Type Ionizer

08 8 (Metric) 09 5/16" (Inch) Symbol Type 01 AC adapter (With AC cord*2) 02 AC adapter (Without AC cord) 03 Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-01 1 8 3 position 0.73 0.18 1.1 (0.55) 0.26 (0.52) 0.31 0.24 (0.16) 73 (38) 1.2 (0.51) 0.29 (0.14) 0.89 0.47 0.24 (0.45) 0.24 Note 1) [ ]: Denotes normal position.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-02 AS3201FE, AS3211FE AS3301FE, AS3311FE AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FE, AS4211FE

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

ASN AQ ASV Flow Rate and Sonic Conductance Symbol AK AS221F-01 AS121F-M5 AS221F-02 AS321F AS421F Model Tubing O.D.

EXxx-OMY0006CN

EX245-DY1 EX245-DY1 36 No.EX##-OMY0006CN 8.2.2.4.

Digital Flow Switch ( compatible)

Device state parameters (index 36) Readable device states are as follows.

PFxx-OMX0002

Device state parameters (index 36) Readable device states are as follows.

PFxx-OMX0007

Device state parameters (index 36) Readable device states are as follows.

LFE-OMY0008

[F 2] OUT2 36 No.LFE*-OMY0008 1. 1. 1. 1. [F 2] [oUt2] OUT2 [-] 2. 2. 2. 2. (ON-OFF ) 37 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_2]) 4. 4. 4. 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. 4. 4. 4. [F 2] OUT2 38 No.LFE*-OMY0008 c. / Add/dEC OUT1 (31 ) ( [n2AH]) ( [n2dH]) c.(32 ) 4. 4. 4. 4.

DOC1023126

(see P.36 Fig.2-1 and Fig.2-2 for circuit example) If the C24V is shut off when stopped, the operation will start when IN0 or IN1 turns ON after the stop is released. For closed center mode It operates according to the state of the IN0 and IN1 signals. If you do not restart the operation after releasing the stop, release the stop while both IN0 and IN1 are OFF.