ZX

Ejector exhaust Nil Y M5 x 0.8 05 07 0.5 mm 0.7 mm 1 2 With silencer M6 x 1 (Option) 1 8 Port exhaust Rc 3 Common exhaust (Manifold only) 10 1.0 mm Vacuum switch electrical entry Nil L Lead wire length 0.6 m Grommet type Valve unit/Combination of supply valve and release valve Refer to Table (1) on page 13-2-7.

ASP

L6 T2 A1 H1 L5 A3 T1 A2 Applicable A1 A2 A3 D1 D2 H H1 L1 L2 L3 L4 L5 L6 M T T1 T2 tubing Model number diameter d 6mm ASP330F-U01-06-X352 ASP330F-U01-07-X352 ASP430F-U02-07-X352 ASP430F-U02-08-X352 ASP530F-U03-10-X352 ASP530F-U03-11-X352 ASP630F-U04-12-X352 ASP630F-U04-13-X352 45.7 9.4 16.1 11.6 45.5 51.1 1/8 Uni G 1/8 14.2 14 29.3 14 13.7 38.4 22.9 26.9 34.6 to 39.6 1/4 1/4 63.6 10.4 23

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

AS

AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 AS-32B AS-33B AS-34B AS-35B AS-34B AS-31B AS-33B AS-36B AS-32B AS-37B AS-38B M3 M3 AS-36B AS-34B 4 4 AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 M4 4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

212

Applicable model LVR20 LVR40 LVR50 06 6 x 4 LVR20 LVR40 LVR50 07 1/4" x 5/32" 12 12 x 10 11 3/8" x 1/4" 19 19 x 16 13 1/2" x 3/8" 19 3/4" x 5/8" : Basic size : With reducer 07 LVR 2 0 T Tube extensions Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 Tubing size Tube extensions Metric size Inch size Symbol Tubing size Applicable model Symbol Tubing O.D.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

11.4 52.2 6.2 25.2 53 47.6 16.5 6 12.8 AS2051F-07-3 AS3001F-08-3 64.4 8.2 32.1 60.9 55.5 18 15.5 1/4" 13.2 54.4 7.1 26 53.8 48.4 17 15.2 8 3.5 17 13 21 18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXW1-NT1_eng

NETHERLANDS (31) 020 5318 De Ruyterkade 120, NL-1011 AB Amsterdam, the Netherlands NORWAY (47) 67 12 90 20 Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway POLAND (48) 22 211 96 00 ul.

HRX-OM-M090

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-W058

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-X027

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R016

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-W038

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.