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0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

Weight (g) 5 7 8 13 14 Applicable tubing O.D. Applicable tubing O.D. Weight (g) 0.7 1.1 1.4 1.7 2.0 Applicable tubing O.D. Part no. Part no. Part no. Part no. N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

AM20 AM30 AM40 12 16 14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure

85 g 43 g C3602 (electroless nickel plated) O-ring: HNBR Piping port Including lead wire with connector (3 cores, 2 m) 71 g 75 g 33 g 73 g 77 g 35 g 75 g 79 g 37 g 73 g 77 g 35 g 75 g 79 g 37 g 70 g 74 g 32 g Weight Including lead wire with connector (4 cores, 2 m) Excluding lead wire with connector Optional Part No.

34.3 27.5 12 36 8 9 54 Plug: KFP Weight (g) 0.3 0.5 0.7 1.0 1.4 Applicable fitting (mm) Model L D KFP-04 KFP-06 KFP-08 KFP-10 KFP-12 12 12 12 13.5 14 6.5 8.5 10.4 13 15 4 6 8 10 12 15-2-51 Series KF Swivel Elbow: KFV H1 (width across flats) H2 (width across flats) H3 (width across flats) H4 (width across flats) Applicable tubing (mm) Effective area (mm 2) Connection thread R Weight (g) L2

/See 7.3 Caution(12) on p.43 and Caution(14) on p.44 g < Trigger LV> The condition at which INP output signal is turned on. Set it at the value equivalent to the pushing force or less. /See 7.3 Caution(12) on p.43 The INP output signal is given when the target force (Trigger LV) is achieved.

Weight (g) 5 7 8 13 14 Part No. Part No. Applicable Tube O.D. Applicable Tube O.D. Weight (g) Part No. Part No. L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling.

D L KFP-04 KFP-06 KFP-08 KFP-10 KFP-12 4 6 8 10 12 6.5 8.5 10.4 13 15 12 12 12 13.5 14 99 Series KF Insert Fittings Swivel elbow: KFV Applicable tube (mm) A Effective orifice (mm 2) H1 (Hex.) H2 (Hex.) H3 (Hex.) H4 (Hex.) Weight (g) Thread R(PT) Part No. L1 L2 L3 L4 M d O.D.

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

Prefix it to the part nos. of the solenoid valve, etc. 4-8-12 13 3 Port Pilot Operated Poppet Solenoid Valve Rubber Seal Series VP300/500/700 Dimensions: VV3P3 (For N.C.) Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Stations 1 2 3 4 5 6 7 8 9 M SMC 56 28 AXT100-DR-8 110.5 AXT100-DR-10 135.5 SMC SMC K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 11.5 8 AXT100-DR-14 185.5 12 12 3 AXT100-DR-16 210.5 AXT100-DR-19 248 AXT100-DR-21 273 AXT100-DR-23 298 81 16 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 OUT IN OUT IN ARM11BC2-08 Knob position: Bottom L2 L2-10.5 L1=(28 x n)+36 18 28 52.5 39 28 12 12 5.3 3

=r: 14 EJ ffi) n:H" NXT OAG14A NXT OIG}1 P M AJ(I &44 NXT 0rG17'4 7 1 10 1 1 4 &ait 3 12,34 t5,et 21,t6 2a.12 ?f21 n. g!4) 31t1 l,loB thln 8 rtrtlo.n @itact tctoP. DritENsroNs A B c D E F G H J K lul N o P R s T u 3.43 (84 2.43 (72) 1.89 (48) 2.61 {67) 3.54 {so) 1.73 (44) 1.81 (46) 3.54 (90) 1.97 (s0) 0.79 (20) 0.35 (91 5.12 (130) 4.

(R)G -01T 2 3.4 Mounting holes M5 x 0.8 External pilot port 53 14.5 14.5 (Only external pilot type (R)) R3.5 8.5 12 X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115

Model T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3

Flow Rate and Sonic Conductance AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)

The provision of a G 3/4 electrical entry allows connection of conduit fittings. Maximum stations are 11. (12 stations as an option) 1 station is used for terminal block box mounting.

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77