Electro-pneumatic Proportional Valve Series VEF/VEP 1

3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2

VT325

VZ Hexagon socket head screw DXT083-19-1 2 pcs.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AR20-B to AR60-B

piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

PSxx-OMG0005CN

B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

CLQ

2".

Compact Cylinder with Lock Series CLQ

x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized) Rod end

V100

List part numbers of the installed valve and option in required station location separately under manifold part number. 4-2-7 8 Series V100 Common SUP/Common EXH Type S41 How to Order Applicable solenoid valve Note) VV100 S41 05 M5 V114V114AV124V124AStations 2 port size 02 M5 M5 x 0.8 2 stations 2 Applicable blank plate assembly V100-77-1A 1 20 20 stations 3 2 1 port M5 x 0.8 3 port M5 x

Quick Exhaust Valve Series AQ 1

1 4 8 3 1 2 3 4 AS Specifications Air 1.5 MPa 0.7 MPa 1 MPa 0.1 MPa 0.05 MPa 5 to 60C (No freezing) Fluid Proof pressure ASP AQ150 AQ2000 to 5000 AQ150 AQ2000 to 5000 ASN Max. operating pressure AQ Min. operating pressure ASV Ambient and fluid temperature AK ASS How to Order JIS Symbol ASR AQ 0 0 02 2 0 ASF Standard size Option 1 8 1 2 3 5 H L High temperature (5 to 80C) Low temperature (

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

connector + "LN", "MN" types: with 2 sockets. 641 A 3 port solenoid valve 10-V100 Base mounted (with sub-plate) Note) [ ]: AC < >: Large flow type (A) Grommet (G)/(H): 10-V1 4(A)-M5 1 2 G H 13.1 (Light/surge voltage suppressor) 5 + 13 15.5 3 13 3 (For mounting) 2-2.6 28.5 [35.5] <32.4> 10 G: Approx. 300 H: Approx. 600 (Lead wire length) 1 30.8[33] <33> 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Quick Exhaust Valve Series AQ

1 4 8 3 1 2 3 4 AS Specifications Air 1.5 MPa 0.7 MPa 1 MPa 0.1 MPa 0.05 MPa 5 to 60C (No freezing) Fluid Proof pressure ASP AQ150 AQ2000 to 5000 AQ150 AQ2000 to 5000 ASN Max. operating pressure AQ Min. operating pressure ASV Ambient and fluid temperature AK ASS How to Order JIS Symbol ASR AQ 0 0 02 2 0 ASF Standard size Option 1 8 1 2 3 5 H L High temperature (5 to 80C) Low temperature (