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Vacuum Regulator

, IRV20: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs With digital pressure switch Fittings Nil L Straight Elbow Note 1) Two plug nuts are mounted on the gauge port.

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

VZ3000

pitch) (Lead wire length) G: 300 mm H: 600 mm 2-M5 x 0.8 (PE port) 4-Rc 1/8 (Piping port) L plug connector (L) VZ3 40-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ Made to

HRX-OM-W004

Communication alarm function . 4-1 4.1 Communication alarm occurs . 4-1 4.2 Communication alarm reset . 4-2 4.3 Setting and checking . 4-2 4.3.1 Setting and checking items. 4-2 4.3.2 Setting and checking . 4-3 HRR Series HRX-OM-W004 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication

SYJA3000

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

FILTER REGULATOR

G46-10-01 Rc G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-L G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting

FILTER REGULATOR

G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G G36-10-01 G46-10-01 G36-4-01 G46-4-01 1 0.2MPa setting Rc G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting

KJ

Weight Color of release button Model KDM10-01 KDM10-03 KDM10-07 No. of connecting tubes 1 8 5 32 1 4 5 16 1 8 5 32 1 4 5 16 300 g 10 Red KDM10-09 520 g KDM20-01 20 KDM20-03 520 g KDM20-07 KDM20-09 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

Speed Controller: Standard Type Series AS In-line Type

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 Construction AS2200-01

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

HRX-OM-W002

26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20 1 10 12 1 13 4 15 3 16 1 15 2 16 18 4 8 4 3 24 24 3 2 14 (CN6) BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL 3 2 1 4 4 3

VZS2000

Note 2) Response time is based on JIS B 8375-1981. (0.5 MPa, without light/surge voltage suppressor) Note 3) For VZS250-FZ-01 Note 4) Note 1 and Note 2 are with controlled clean air.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Table of Contents

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

VK300

Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male