CU

Main circuit of switch OUT Black [White] 7 7 0.5 7 Lead wire length (m) 32 34 3 34 52 56 5 56 DC() Blue [Black] Dimensions D-F9PW(V) D-F9W M2.5 x 4 Slotted set screw DC(+) Brown [Red] Indicator light Main circuit of switch Main circuit of switch 2 2.7 OUT Black [White] DC() Blue [Black] 22 2.8 2.6 4 D-F9BW(V) Most sensitive position 6 DC(+) Brown [Red] D-F9WV M2.5 x 4 Slotted set screw Indicator

MB1

/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5 32 38 46 56

MHF2

D-F9NW, F9NWV DC (+) Brown Main circuit switch Main circuit switch Auto Switch Weight Table OUT Black Unit: g D-F9NW(V) D-F9PW(V) D-F9BW(V) Model DC () Blue 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown Auto Switch Dimensions OUT Black D-F9W D-F9W D-F9W D-F9W Switch mounting screw M2.5 x 4l Slotted set screw DC () Blue 2 2.7 Indicator light D-F9BW, F9BWV

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

SV

KG: RKT5-56 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Function SW+ No.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Threaded type PPS LVQ i PFA 3 Diaphragm PTFE LQ1 End plate PPS 4 PFA body only Insert bushing 5 PFA LVN 6 PFA Nut t y PP Lever 7 TL/TIL PFA Collar 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D E F G H1 H2 J K L M N Model LVH20 LVH30 LVH40 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56

Rotary Table/Rack & Pinion Style Series MSQ

accommodate mounting conditions Side direction A port Side direction B port A port B port Front direction 272 Rotary Table Series MSQ Rack & Pinion Style Small sizes 1, 2, 3, and 7 Small sizes 1, 2, 3, and 7 Small size and light weight A CRB2 CRBU2 B CRB1 MSU Measure CRJ mm A B C D Mass (g) 70 105 150 250 Full size (Picture of MSQB1A) Size 1 2 3 7 Model CRA1 MSQB1A 50.5 28 25 16 C D MSQB2A 56

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 20 25 32 40 50 63 80 M5 x 0.8 1/8 1/8 1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56

Clamp Cylinder Series CK1

Shaft: 18 Hole: 18 +0.027 0 0.050 0.093 2 x M6 Thread depth 6 Press-fit spring pin 5 x 40 L 38 17 32 37 48 24 28 +0.5 +0.1 85 61 25 70 90 Double knuckle joint CKPA100 Built-in strong magnet type / with magnetic field resistant auto switch (D-P79WSE type) 56 63 56 + Stroke 34 Speed controller needle Top width across flats 4 Cushion valve Top width across flats 4 10 13 30 3 x Rc 3/8 14 10

PA3000/5000/PAX1000

Series PA3000/5000 Dimensions/Automatically Operated Type PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56

PFA/PFW

(4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Sectional view Standard size Minimum position Seal End face Insert bushing Body Tubing Reducer type 17-5-56 15 Series LVD High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below.

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (Pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (Pilot air supply port) (257) 112 Rc 1/4 56 165 56 Reset button

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 69 56 32 24 Station L1 L2 L3 L4 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 20 341 328 304 296 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8 10.4 56

XL

66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(

pa

165 56 Reset button RESET FLUID OUT PROCESS PUMP 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202 114 3.5 3 AIR EXH (Pilot air exhaust port) FLUID IN Rc 1/2, 3/4 Rc 1/4 17-5-152 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order VC 1 1 PA 3 03 3 PA3000 VDW VQ Port size Body size VX2 3 5 03 04 06 3/8 standard 1/2 standard 3/8(10A): PA3 1/