KA

13.4 13.4 17 40 25 50.5 52 1 8 1 4 46.5 46 KAU08-U01 KAU08-U02 26 24 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 27 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 61 55 20.9 12 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

Rotary Table/

8 !1 @1 !2 q @0 u !

PA3000/5000/PAX1000

per minute 1 60 = x x Reference life cycles Cycles per minute 1 8 (daily operating time) Service life 1 60 = 1 8 50,000,000 50 x x 2083 days = 27 Process Pump Common Precautions 5 Be sure to read before handling.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 3 DI2 1 0 1 Program No. 6 DI-1 1 1 0 Program No. 7 1 1 1 Program No. 8 Note. 0: off 1: on Program input 1 PI1 Turn PI1 on to resume the step stopped by the SINK (1) command in the program.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

MU

3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50

Series LQ3 High Purity Fluororesin Fitting

2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination

F

Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

Table of Contents

1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Solid State Auto Switches

Refer to front matter 57 for Safety Instructions and pages 8 to 12 for Auto Switch Precautions. Caution 1. Use the reed switch within the operating range.

AR20-B to AR60-B

C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Different diameter tubing can not be selected for the body size 1. Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C.

15

58 14 10 24 76 24 CY1SG15-Z RJ0806LN M8 x 1 M4 x 0.7 M5 0.8 30 50 76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) Rc 1/4 75 5 120 32.5 45.5 Bottom 15 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) Series PB1000 How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8 standard Nil Pump only With foot (bolts included) KT-PB1-3 B Body material

CEx-OMQ0011

( ) f. g.( ) h. i. j. k. l. 4. 4. 4. 4. 5. 5. 5. 5. 6. 6. 6. 6. 7. 7. 7. 7. 2. 2. 2. 2. 8. 8. 8. 8. ,, 1. 1. 1. 1. 9. 9. 9. 9. 2. 2. 2. 2. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2

MY1

MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB

Precision Cylinder Series MTS

Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon