Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 !2 !3 !4 !7 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Except for when the version does not match or when in SIO mode) The display color can be set to red or green. 4 Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10 19.5 22.8 12.8 10 D2 H Connection threads 8 15.2 18 26 21.5 26.3 12 M (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 H 17 20.9 12

Stroke Reading Cylinder and Counter

0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

LFE-OMZ0011

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Digital Flow Switch Series PFA For Air Series PFW For Water

Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

4) Connector (Option) 1 CH 2 3 4 r Pin no.

Mist Separator Regulator

Standard Specifications AWM20-D AWM30-D AWM40-D Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/4 Pressure gauge port size Note 1) 1/8 Fluid Air Ambient and fluid temperature Note 2) -5 to 60 oC (with no freezing) Proof pressure 1.5MPa Max. operating pressure 1.0MPa Without auto drain 0.05 to 0.85MPa Auto drain (N.C) 0.15 to 0.85MPa Set pressure range 0.1 to 0.85MPa Auto drain (N.O) 0.1 to

Ｍ icro Mist Separator Regulator

Standard Specifications Model AWD20-D AWD30-D AWD40-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/4 Pressure gauge port size Note 1) 1/8 Air Fluid -5 to 60 oC (with no freezing) Ambient and fluid temperature Note 2) 1.5MPa Proof pressure 1.0MPa Max. operating pressure 0.05 to 0.85MPa Without auto drain Auto drain (N.C) 0.15 to 0.85MPa Set pressure range 0.1 to 0.85MPa Auto drain (N.O) 0.1 to

Thermo-con

RS-232C RS-485 5 4 1 1 Unused BUS+ 2 RD BUS 3 SD Unused 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3. External sensor connector (EXT.SENSOR) D-sub 15 pin (socket) Holding screw: M2.6 4 5 6 3 8 7 1 2 Pin No.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

LV50-OMQ0002

Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

Vacuum Regulator

1 2 3 43 Description Pressure gauge Gauge nut O-ring R 1/8 23.5 3 breathing port 1 to 3 are assembled before shipment. 39.5 2-Color Display High Precision Digital Pressure Switch Part No.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1 t @4 #1 #0 !9 i u !8 y r w !2 !4 @7 $3 #8 #9 $0 $2 #7 @8 @9 o !6!0 @1 $1 !7 SMC !5 #6 @3 !

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06

Compact Cylinder

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9NV M9N 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V 12 V IC circuit M9PV M9P Reed switch Solid state switch M9BV

LEYx-OMZ0015

Part name Qty (1) Electric Actuator /LEY Series 1 (2) Driver / LECS Series 1(in case with driver) (3) Motor cable Pre-installed (1) (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1(in case with I/O connector) LECSB(Pulse input) / LECSB-T(Pulse input / Positioning) (2) Driver (3) Motor cable (4) Encoder cable (5) Lock cable DC24 PC, PLC, etc (1) Electric Actuator (

CLQ

Lead wire length (m) Load voltage Note 3) Note 1) Direct mount Rail mount Indicator light Bore size (mm) Foot Flange Double clevis Special function Wiring (output) Electrical entry Type Applicable load None (N) 20 to 100 32 to 100 3 (L) 5 (Z) 0.5 (Nil) DC AC In-line Perpendicular Perpendicular In-line CLQ-D020 CLQ-F020 CLQ-L020 20 25 32 40 50 63 80 100 3 wire (NPN equiv.)

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc