IDX-OM-W026

11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

NCA1

9/16 5/16-24 3 1 1/2 0 3/8 1.3 1.06 19/32 3/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2.48 2 3/8 4 3/4 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3.75 1 7/8 0 1/2 1.57 1.18 5/8 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2.72 2 5/8 5 5/8 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4.5 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 2.72 2 5/8 5 5/8 27 Series NCA1 Medium

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

IDX-OM-W014

-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

Series KV2 Fittings

(g) Bag/Box Quantity MA MB L1 L2 L3 P A* 5/8 1/2 1/2 1/2 5/8 5/8 1/4 3/8 3/8 3/8 3/8 1/2 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 1/2-14 KV2Z07-15-37S KV2Z11-13-35S KV2Z11-13-36S1 KV2Z11-13-37S1 KV2Z11-15-37S KV2Z13-15-37S 25.40 25.40 25.40 25.40 25.40 25.40 28.9 23.9 23.9 23.9 28.9 28.9 29.8 29.8 29.8 29.8 29.8 29.8 37.9 34.5 34.5 34.5 37.3 36.4 33.7 27.2 28.2 31.2 33.7 33.7 28.9 23.9 23.9 23.9

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 29 (30) AS32l1FG-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32l1FG-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 30 (31) AS42l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 54 (53) 20.9 30.2 (30.3) 1/4 17 (17.5) 13 Note 1) Reference

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2.

Table of Contents

Series ASV Speed Exhaust Controller Size: M3, M5, 1/8, 1/4, 3/8 . How to Order . Construction. Dimensions . Check Valve Series AK. Series AK Check Valve. Specifications. How to Order . Construction. Dimensions .

ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

EXxx-OMY0006CN

TD++ 1 1 TD++ RD++ 2 2 RD++ TD-3 3 TD-RD-4 4 RD-Fig. 7-12 / 31 No.EX##-OMY0006CN Case 1 Case 2 Fig. 7-13 7.2.2.

Series VQ Metal Seal/Rubber Seal Body Ported

D-sub connector Polarity Lead wire color Dot marking 55 2-M2.6 X 0.45 SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B SOL.A SOL.B 1 ( ) ( + ) Black 2 stations { { 1 station 14 ( ) ( + ) Yellow Black Socket side 14 25 2 ( ) ( + ) Brown 15 ( ) ( + ) Pink Black 3 ( ) ( + ) Red 3 stations { 16 ( ) ( + ) Blue White 1 13 Terminal No. 4 ( ) ( + ) Orange

KK/KK13

/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

S Couplers Series KK/KK13

19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

MK

1 4 Note 1) Above figure is for D-A73/A80.