13

43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body ported type (Without silencer) 88 53 3 8 3 8 Supply

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Metal seal Rubber seal (1) Without (1) (1) With Function (1) With (w/o light) Symbol Specification DC (1.0W) AC Note 1) DIN style is applicable to VQ2000, 3000.

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58

Rotary Actuator

S 1 pc.

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10 19.5 22.8 12.8 10 D2 H Connection threads 8 15.2 18 26 21.5 26.3 12 M (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 H 17 20.9 12

KG

-03 29 42.5 34 1 8 1 4 KGY08-01 KGY08-02 43.5 45.5 24.5 28.5 12 17 13.4 10.6 14 22 12 23 15.2 8 14 18.5 25.6 17.7 3 8 KGY08-03 17 30.5 47 36 1 8 KGY10-01 27 49.5 31 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 40.0 28.4 17 26.5 18.5 Connection thread 39 1 2 KGY10-04 36 54.5 66 31 41 22 2-applicable tubing 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 57.4 45.4 17 28.5 20.9

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

79 [83.4] 91.9 [96.3] 1 55 109.7 82 94.9 (Lead wire length) Approx. 300 59.6 [66.6] Approx. 300 (Lead wire length) 48.4 [55.4] 33.1 Refer to page 1-5-79 for dimensions with connector cable.

IDX-OM-W028

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly. 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Chapter 6.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Digital Flow Switch Series PFA For Air Series PFW For Water

Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

only) 2 position 1/8 M5 x 0.8 56 66 58 3 position Note 1) Dedicated for manifold base.

LFE-OMZ0011

Close proximity setting (Normal flow) Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Initial setting Setting1 Setting2 Setting3 Close proximity setting (Reverse flow) Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec. Pressed for 1 sec.

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

ZP3

Mounting How to Replace the Pad 1. Tighten the screw within the specified torque range when mounting the buffer. 1.