REGULATOR

38.5 19 7 AR40K-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40K-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50K-B 70 66 65.8 11 13 90 3.2 AR60K-B 70 66 65.8 11 13 90 3.2 Note 1) B dimension is a size in the state to unlock the handle.

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double Power Cylinder Series

MGC

1 !2 !3 !4 !5 !6 !7 !8 No.

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25 20 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 200 to 1000 150 to 1000 150 to 700 150 to 700 866 Sine Cylinder 1011-REC 1011Rod flange (F): RECF 2 x P (Rc

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

PSE530/200

selection: 20 ms, 160 ms, 640 ms Anti-chattering function ZSP 0.1% F .S. or less Repeatability 0.5% F .S. 1 digit or less (at ambient temperature of 25 3C) Setting/Display accuracy ISA2 For measured value display: 4-digit, 7-segment indicator, Display color: Yellow Display IS For channel display: 1-digit, 7-segment indicator, Display color: Red Red (Lights up when output is ON.)

VXR21/22/23

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B 0 1/4, 3/8 30 21.3 1/8 9.8 34 53 43.9 44 71.9 64.5 5.4 28 15.4 27.5 55 M32 x 1.5 2.3 27.5 25.7 32.5 16 6 10-/21-AR30K-B 66.4 3.5 1/4, 3/8 24.8 41 1/8 10.5 40 53 44 45.8 85.6 6.5 30.7 8 29.4 53 M38 x 1.5 2.3 29.4 31.1 38.5 19 7 10-/21-AR40K-B 70.8

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Note 2) Refer to page 7 for further information of options.

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (

5 Port Solenoid Valve

(Not applicable to Gateway Unit) Connector type manifold Connector Wiring Diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin connectors

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

ZP

flats 7 Hexagon width across flats 7 Hexagon width across flats 7 Flat with ribs Flat with ribs Applicable Tubing Flat/Flat with Ribs Flat/Flat with Ribs G: M5 x 0.8 Y G: M6 x 1 G: M6 x 1 Y Applicable tube O.

HRX-OM-Y098

3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-11 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication

HRX-OM-R016

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

DOC1001322

to 3 .5-55 Setting of contact output signal 4 to 6 .5-55 5.4.10 Temperature waveform screen.5-59 Chapter 6 Alarm Notifications and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting . 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-

LJ1H

B A C D 7 8 Standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm/10mm lead Horizontal Mount How to Order Stroke LJ1H202 PA 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B 2 3 4 5 Axial Right Left Top Bottom 2m 3m 4m 5m Axial entry

S Couplers

-04M-1) 8 8 KKA6 Series (KKA6P-04M-1+KKA6S-04M) Flow rate m3/min (ANR) Flow rate m3/min (ANR) 7 7 KKA4 Series (KKA4P-02M-1+KKA4S-02M-1) 6 6 KKA4 Series 5 5 (KKA4P-02M-1+KKA4S-02M) 4 4 3 3 2 2 1 1 KKA3 Series (KKA3P-01M-1+KKA3S-01M) KKA3 Series (KKA3P-01M-1+KKA3S-01M-1) 0 0 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Pressure