Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

16 MHSH3-63DA MHSH3-80DA 4 4 3 3 7.2 8.2 10.2 11.2 6 6 18 21 Note) For dimensions, refer to the MHSH3-32 to 80D dimensions on page 579.

Stainless Steel 316 Fittings

5 16 12 8 11 12 32.6 29 d 5.8 6.6 14 17 13 15 25 43 69 68 71 68 122 10 14 14 17 36.6 40.4 32.2 35.8 7.6 21 18 17 21 44.8 39.4 M M L2 8.5 21 19 17 21 48.1 41.7 L1 9.3 27 25 22 27 52.3 45.9 Union Elbow: KFG2L Applicable tube size (mm) O.D.

CM2

, refer to pages 6-4-21 to 6-4-22.

CG5-S

40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14 58

•

12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

CG5-S

12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14

VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Air Slide Table

7 7 1 A B NN x M4 x 0.7 Tapped through hole 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) ZZ 48 58 68 86 96 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 K 21.5 31.5 41.5 51.5 61.5 J 17 27 37 48 65 I 9 9 9 16 9 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 N 4 4 6 6 6 HA 16 26 20 28 28 Model F 22 25 21 26 27 GA 13 13 29 39 49 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6-40 MXQR6-50 Note) Note)

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

" 1/4" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 12.7 10 10 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

ZP

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Air Cylinder

30.4 5.5, 9.5 depth of counterbore 6 15 18 M8 x 1.25 27 1/8 75 38 11 104 25 Up to 200 22 19.5 17 10 14 2 22 10 32 6 31 5.5 8 36.4 6.6, 11 depth of counterbore 7 18 22 M10 x 1.25 29 1/8 77 44 12 111 32 Up to 200 22 19.5 17 12 18 2 26 10 32 6 38 5.5 10 42.4 9, 14 depth of counterbore 9 21 24 M10 x 1.25 33 1/8 83 45 13 117 40 Up to 300 30 27 19 16 25 2 30 10 39 8 47 6 14 52.4 11, 17.5 depth

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Cylinder with Lock

y @8 #6 e t u i !

MGG

7 8 9 10 11 12 13 40 and larger are the same as number 6.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OUTLINE DRAWINGS 9.1 Driver (1) LECSS2-T5/LECSS2-T7 [Unit: mm] 40 Approx. 80 6 mounting hole 6 135 Lock knob 6 CNP1 CNP2 156 6 161 168 CNP3 LECWith MR-BAT6V1SET Approx. 21 Approx. 69.3 PE 6 Approx. 38.5 4 Mass: 0.8 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [N m] CNP1 CNP2 CNP3 Approx. 40 Approx. 6 Approx. 6 L1 P+ U 6 2-M5 screw C D V L2 L3 W NP3 L11 L21 P4 Approx

Vacuum Module Series ZX

Solenoid valve rated voltage L C CL CN B (5) Digital vacuum switch unit Light/Surge voltage suppressor None With light/surge voltage suppressor 1 C 0X ZSE3 D 21 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector only. (Connector assembly with rectifier is attached.)