Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

Series KV2 Fittings

(g) Bag/Box Quantity Hex M D2 L1 L2 L3 A* 1/4 3/8** 1/2** 1/4** 3/8** 1/2** 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 3/8-18 Male Hex. Male Hex. Male Hex.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 623 3 Port Pilot Solenoid

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

CV/MVGQ

30 32 40 40 52 52 10 10 10 14 14 30 35 35 40 40 9 9 11.5 13.5 13.5 4 4 0 0 0 12 12 15 18 18 60 70 86 102 116 80 90 105 130 150 27 32 32 37 37 71 81 101 119 133 60 70 86 102 116 42 50 59 76 92 100 110 130 160 180 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

CE

+ 0.02 18 40 4 depth 4 + 0.05 + 0.02 Without connector (Positioning pin hole) 4 45 4-M6 x 1.0 Thread depth 12 6 Metal connector M14 x 1 4-M6 x 1.0 depth 6.5 (Bottom 5.3 through-hole) 9.5 counterbore depth 5.5 (500 or 3000) 25 70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53 35.6 23 36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2-M5 x 0.8 (Port size) 4-M5 x 0.8 Thread depth 10 74 20 114 +

CE

1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

HRX-OM-Z002

. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40. 9-12 9.5 COOLING CAPACITY . 9-13 9.5.1 HRLE050-A-20. 9-13 9.5.2 HRLE050-W-20. 9-13 9.5.3 HRLE090

Magnetically Coupled Rodless Cylinder

W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs)

Modular F.R.L. Units

-A, AFD30-A/40-A).

High Power Cylinder:

27 30 5.8 to 8.8 6.8 to 11.3 Axial foot GA Rc(PT)P H GB F Rc(PT)P K F Effective Thread H2 A WH NN I MM H1 NE D LY ND NB 4-LD LH LT NF E 10 E JD N 10 JC N NA X Y X Y S+Stroke LX LZ LS+Stroke ZZ+Stroke (mm) Bore (mm) 20 25 32 40 Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 I 26 31 38 47 F 16 16 19 21 A 18 22 22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

CRBB-OM00004

Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.

0.55

How to Order Manifold Assembly Example (VV5F3-40) Closed center (24 VDC) VF3340-5GZ1 (1 set) Double solenoid (24 VDC) VF3240-5GZ1 (1 set) Single solenoid (24 VDC) VF3140-5GZ1 (3 sets) Manifold base (5 stations) VV5F3-40-052-02 U side 1 3 2 Stations D side VV5F3-40-052-02 1 set (Type 40, 5-station manifold base part no.) VF3140-5GZ1 3 sets (Single solenoid part no.)

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

CE

Series CEP1 Foot type 4-4.5 CEP1L12 Stroke 4 (Positioning pin hole) 40 5.5 13 25 6 +0.05 +0.02 66 54 47.5 17 40 27 3.5 51 Front flange type CEP1F12 Stroke 4 (Positioning pin hole) 4 (Positioning pin hole) +0.05 +0.02 +0.05 +0.02 27 18 6 5.5 38 4-4.5 50 6 Series CEP1 20/Dimensions Direct mounting front tapped type CEP1B20 Stroke (Positioning pin hole) 4 depth 4 Cable end +0.05 +0.02 18 40

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 Size 25 32 40 50 Size 25 32 40 50 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 L1 27 31 36 46 A1 10.5 12 14 18 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 Part no.