HRX-OM-I051

Check for fluid leak from circulating fluid piping in your system. 20 Internal Pump Time Out WRN Continued 21 Controller Error FLT Stop An error was detected in the control system. Contact the system supplier for request of inspection and repair.

ARX Series

Dimensions Dimensions 4-R .1(2.5) .47 (12) .98 (25) 1.63 (41.5) .67 (17) 1.34 (34) .94 (24) .65 (16.5) 1.02 (26) Panel nut Gasket .43 (11) .06 (1.5) .94 (24) 1.73 (44) .21 (5.4) Max. panel thickness .18 (4.5) .06 (1.6) 2.13 (54) Install the gasket underneath the panel or bracket (bonnet side). Tighten the panel nut by hand without the use of tools. 3

VQ7-6/7-8

P.7 Manifold Dimensions (DIN Connector Type) P.8 Manifold Dimensions (Prewired Connector Type) Manifold Options P.9 to 12 Manifold with Control Unit P.13, 14 Option Dimensions P.15, 16 Series VQ7-8: Single Unit How to Order Valves P.17 Models, Standard Specifications P.18 P.19 Single Unit Valve Dimensions (DIN Connector Type) P.20 Single Unit Valve Dimensions (Prewired Connector Type) P.21

48

M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5

3 Port Solenoid Valve/

Thread Rc G NPT Nil None V V V A Yes 8 V B 5/16" V Port size 06 3/4" 10 1" * For internal pilot, the symbol is nil. * Refer to Piping for External Pilot Type on page 20 for selection of the check valve. Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-.

SL5200

MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01 No code A High flow (Cv: 0.15) HF 1) Only available with SL5201. 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) 02 06

Table of Contents

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

45

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

45

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Series HAW Water Cooled Aftercooler 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.

HRX-OM-K003

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

Digital Flow Switch

cover (Part no.: ZS-46-D) 47.8 50.8 33.5 34.5 20.2 11 R4.5 R4.5 33.5 34.5 21 42.4 Panel thickness 0.5 to 7 Power supply/output connection lead wire (Part no.: ZS-46-5L) Sensor connector (Part no.: ZS-28-CA-4) 5 12.35 Pin no.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Operating pressure (MPa) 1778 Series VPA450/470 5 Port Air Operated Valve Flow Characteristics/Mass Port size Function Flow characteristics Mass (kg) 14/2(PA/B) 4/25/3(A/BEA/EB) Valve model b Cv b Cv 15 17 21 15 17 21 16 18 22 16 18 22 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16

PA3000/5000/PAX1000

suction Transfer of liquid by pressure Atomizing of liquid Stirring of liquid Prevents sticking of liquids Features 2 Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.

70pvpump

32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated type 50 million cycles 50 million cycles Approx. 22 ml PA3000 air operated type 50 million cycles LVD Approx. 90 ml PA5000 air operated type 50 million cycles Approx. 21

XL

How to Order Coil Assembly (DC for XSA) VX021 001 C B 05 Rated voltage Note1) Coil assembly 05 24VDC 06 12VDC Applications 6VDC 51 Size part no. Applicable Series 001 002 No.1 Solenoid No.2 Solenoid XSA1 XSA2 003 No.3 Solenoid XSA3 53 48VDC 100VDC 55 Note 1) If the leading "0" is removed from voltage symbols 05, 06, these are the same as the solenoid valve symbols.

VZ3000

VQ7 EVS VFN (Piping port) L plug connector (L) VZ3120-L-M5 M plug connector (M) VZ3120-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3120-D-M5 Built-in One-touch fittings VZ3120--C4 C6 MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-21