7 6 9 8 11 10 3 Connector B terminal no.
35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 10.5 14 18.5 24.5 38.5 42 10 13.5 10 13.5 18 24 18 24 38.5 42 38 41.5 Bore size (mm) 3.8-13 World Wide QS\E Support...
"Line name communication data" Value (16 decimal 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F number) 7 seg Display digit 11 seg Value (16 decimal 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F number) 7 seg Display digit 11 seg Value (16 decimal 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F number) 7 seg Display digit 11 seg Remark The value of cannot be displayed -105No.PS-OMW0009
Electric actuators / Slider type Common precautions . 39 6.1 Design and selection . 39 6.2 Handling . 39 6.3 Mounting . 40 6.4 Precaution on maintenance . 40 6.5 How to detach and attach the dust seal band . 42 6.6 Replacement of belt . 43 7.
Q F Terminal part Faston connector 250 Series Bracket mounting hole dimensions a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) 11 E C R 9 6.5 6.5 IN OUT 15 2 x M Depth 5 H B B1 G A 10.5 2 x P Port size (mm) Model A B B1 C D E F G Port size P 1/4, 3/8 1/2 3/4 1 H J M 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5
(Tightening torque: 0.15 Nm) 11) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring.
9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.
M5, M6 M5, M6 KAU23-M5 38 9.6 15.5 34.5 9 M5 0.8 M6 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 1 8 KAU23-M6 KAU23-U01 11 9.6 KAU04-M5 M5 0.8 M6 1.0 39.5 4 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 KAU06-M5 M5 0.8 M6 1.0 42.5 39 2.2 2.2 13 KAU06-M6 43 13 17 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 14 6 Uni thread 1 4 KAU06-U02 39
Refer to pages 11 through 15 for safety instructions and 2 port solenoid valve for fluid control precautions.
10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60
moving to position No. 11 Forward direction (2) Reverse direction (3) Start position End position Operating direction speed acceleration Operation method (1) No. 10 No. 11 Reverse 9 7 Positioning (2) No. 11 Reverse 9 7 Positioning (3) No. 11 No. 10 Forward 5 3 Positioning I/O timing chart when the electric actuator is operated by PLC.
24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.
CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-29
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22
CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124
10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.
Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.
Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Caution Pneumatic Circuit Warning 1. Caution on using the basic style or replacing the support bracket. The lock unit and cylinder rod cover are assembled as shown in the figure below.