Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

MU

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 18.2 22.2 26.2 32.2 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 6 7 8 11 19.6 21.9 25.4 31.2 23 27 31 38 16.5 18 21 26 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)

VQ4000

KG) 5 pins (72309-0115-80-05) Input connector: M12 5 pins (XS2F compatible made by OMRON Corp.) x 8 pcs. Cable side connector example: XS2G made by OMRON Corp. Cable side connector example: Franz Binder GmbH & Co. KG 72309-0114-70-15, etc.

AIR SLIDE TABLE

Product Specifications 1-1 Specifications Model MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Bore size (mm) 6 8 12 16 20 25 Port size M50.8 Fluid Air Action Double acting Operating pressure 0.15 to 0.7MPa Note 1) Note 2) 0.35 to 0.7MPa (with Endlock) Proof pressure 1. 05 MPa Ambient and fluid temperature -10 to 60oC(No freezing) Operating speed range 50 to 500mm/s Note 3) 50 to 300mm/s (Metal stopper

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

%silltr

05 0.o3s27 0.4535 ?,8.3527 L:ngth m m mm 3.281 l.094 0.03937 0.3048 0.914 25.4 TemDeraturc l.8oC+32 ('F-32)/1.8 Area. Section n' cm2 sq. ft. so.inch 10.76 0.155 0.0929 6.45t6 Volume n' m' dm3 foot yard inch 0.76/.5 16.388 2832 Volume Flow n'/min dm3Jmin ffmin) scfm scfm 35.31 0.0353r 0.02832 28.32 Force N oound force (lbf,) 0.2u8 4.448/. Pressure bar lbf.

Title not found

5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

MU

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

Type: 41 (Feedback Sensor Type), Bar Length: 400mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: 3m, One-Touch Fitting: 05 (ø3/16"), Bracket: B (Bracket), Sensor: G (Auto Balance Sensor, High Accuracy for Types 41 & 42)

DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

EXxx-OMN0029CN

EDS Enable (SC_MonOp) 1 1 Disable Auto (SC_RstOp) 2 Manual Enable 3 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 4 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 5 (Idle_MD) ForceON ON Enable Val165000 5 ON ON/OFF (Counter) 6 6 4 Disable 1() 2Hold/Clear Handheld 3PLC 41 5x1000 6DeviceNet TM(DeviceNet TM2) -46No.EX-OMN0029CN-D No. (H.T.) H.T.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

SMC Basic Pneumatics

05 0.o3s27 0.4535 ?,8.3527 L:ngth m m mm 3.281 l.094 0.03937 0.3048 0.914 25.4 TemDeraturc l.8oC+32 ('F-32)/1.8 Area. Section n' cm2 sq. ft. so.inch 10.76 0.155 0.0929 6.45t6 Volume n' m' dm3 foot yard inch 0.76/.5 16.388 2832 Volume Flow n'/min dm3Jmin ffmin) scfm scfm 35.31 0.0353r 0.02832 28.32 Force N oound force (lbf,) 0.2u8 4.448/. Pressure bar lbf.

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

Air Cylinder MGQ Series Compact Guide Cylinder

Use a tishrenirE toqu of 0.05-0.rN.m(05-1.o2kgl.cm)-As a rcuqh guide, tishten the screw thrcush a flrih. 9d after teelins a tisht screv, (M2.5 x 4x ) Compact Guide Cylinder : Series MGQ XBII long stroke 32, 40. 50, 63, 80, 100 Same specifrcations as page 1. 125 ,150 ,17 5,20A MGQM . MGQL Common Dimensions

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

mlu

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

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l6, ~5'K5 BA..Q4 BA-05 BA-06 D-A:3, DA4 D.G3K3 B01-04M B001..Q5M B01-06M B79-0-879 A41--0-A41 880-0880 A49--0-A49 851 0-851 Note)These auto SWitch as cannot be used m magnetic fields.