Piping: Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: M5X0.8 NPTF

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M5N (Base Mounted M5X0.8 NPT)

VXA21/22

Min. 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" in the parenthesis is option symbol. Options Material Tightness of Valve(Leakage) No. Description Standard Brass (Base is aluminum.)

Ejector Valve Unit, Series ZYY/ZYX

-40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

Direct Solenoid

"AC Only "' Not aveilable WDC Solnold Typo NVS 4024, 'm34 03 = 1'r0v 50Hz U = 2mV fiHz 07 = 24VAC ffiHz t09 = 115/120V 6OHz 100/110V 5OHz t10 = 23o/21t0V 60Hz?

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4")

Body Size: 100 (M5, Standard), Material: None, Applicable Tube O.D.: 07 (ø1/4")

This is a legacy product, and replaced byAS1201F-M5-07

VEX-OMV0001

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: U10/32 (10-32UNF), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 07 (ø1/4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: R (or None), Port Size: U10/32 (10-32UNF), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Model: 1FS, Thread: R (or None), Port Size: U10/32 (10-32UNF), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 07 (ø1/4"), Seal: without Sealant

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4")

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: w/o Sealant, Option: B (None)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: w/o Sealant, Option: B (None)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: U10/32 (10-32UNF), Applicable Tubing O.D.: 07 (ø1/4"), Seal Method: without Sealant, Option: BH [for Welding Environments, Brass Parts (External), No Plating)