High Vacuum Angle Valve 40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.
CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when
RESET button 3.6(Mounting hole) SET button 18.7 19 10 1 22.6 ZMA 2 x R1.8 3.6 2 x R1.8 (Mounting hole) (Mounting hole) (Mounting hole) 17.8 1 10 ZQ 19 Pilot valve for supply Release valve ZH Adsorption confirmation switch ZU Release flow rate 2 x 3.3 (Mounting hole) Interface plate adjusting needle A Vacuum port (V) ZL A Vacuum port (V) M5 (or M6) ZY Pitch = 10 M2.5 x 63 Philips screw Air
AS331F-03-06ST 9.5 1.5 49.3 NPT1/4 19 55.3 5/16" 15.2 23 18.5 17 46.1 25.2 6 12.8 38.5 39.7 28.2 54.4 12.9 20.6 AS331F-03-08ST AS331F-N02-11ST 16.2 21 3/8" 17.9 23 49.1 18.5 28.2 8 15.2 39.7 43.7 32.6 56.2 19 9.5 47.7 R 3/8 23 53.7 1.5 AS331F-03-10ST AS331F-N03-07ST 53.5 21 32.6 1/4" 13.2 17 18.5 43.7 10 38.7 25.6 46.1 20.6 12.9 23 16.2 AS331F-03-12ST AS331F-N03-09ST 22 NPT3/8 19 9.5 53.7
(Red) AWG 19 (White) AWG 19 (Black) AWG 19 (Green/yellow) (Note) U V W Note.
CN1:. 18 5.1 . 18 5.2 . 18 5.3 . 19 (1) . 19 1 - (2) . 19 (3) . 19 5.4 . 20 1. 20 2. 21 (3) (). 22 6.
CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.
14.5 11.5 15 10 5 25 19 M22 X 1.5 20.5 4.5 17.5 15 31.5 27 24 Panel Mounting Style CJPB B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X
AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233
Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 46. Note 5) ANR indicates the flow rate converted to the value at 20oC, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator.
Refer to front matters 42 and 43 for Safety Instructions, and pages 17 to 19 for 2 Port Solenoid Valves for Fluid Control Precautions.
The method for measuring the settling time can be selected from the separate axis setting. 1ms 19 Overshoot amount The overshoot amount for position control is displayed in encoder pulses.
Rc 1/4 43.4 36.1 17 -03F 1/4 Rc 3/8 6.9 26.4 18.9 44.4 40.2 19 -04F Rc 1/2 48.6 69.7 T KKA6P-03F Rc 3/8 48.7 84.1 24 -04F 1/2 Rc 1/2 10.0 54.2 20.4 52.9 79.7 -06F Rc 3/4 30 54.6 123.8 KKA7P-04F Rc 1/2 67.7 217.1 32 -06F 3/4 Rc 3/4 13.5 99.6 27.6 69.4 196.8 L2 H -10F Rc 1 72.4 325.9 L1 KKA8P-06F Rc 3/4 41 82.0 420.5 -10F 1 Rc 1 17.5 168.3 35.6 85.0 391.3 -12F Rc 1 1/4 50 87.3 552.8 KKA9P-
socket head cap bolt) (Hexagon bolt) (Hexagon nut) 7 2M5 x 0.8 thread depth 4.5 IN (Piping port) 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 (Through-hole) 4M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side.: Same) 2M5 x 0.8 thread depth 4.5 Note) 4M3 x 0.5 thread depth 4.5 (Opposite side: Same) (15+1/2ST) 19 (Opposite side: Same) 6 3 9.5 27.5 11 (19) (15+1/2ST) 4 Note) 11-, 22: Vacuum suction
MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5
0.020 0.053 25f8 15 25 24 82.9 19 31.8 10 Other dimensions and specifications correspond to the standard type.
(mm) Connection threads Rc Model Effective area (mm 2) Mounting Weight (g) Mounting plate M L2 L1 hole thickness 1 4 8 6 DEF06-02 48 19 17 20 11 14 12 16 16 14 12 13 11 6 max. 4 max. 17 15 50.5 46.5 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 19 19 104 34 51 17 19 17 17 17 19 15 17 7 max. 7 max. 17 17 Connection thread Applicable tubing Mounting plate thickness 15-2-63 Series
No.PF-OMA1007-B PRODUCT NAME Air Management System MODEL/ Series/ Product Number AMS20 AMS30 AMS40 AMS60 Table of Contents Safety Instructions 3 Model Indication and How to Order 12 Names and Functions of Individual Parts 15 Definition and terminology 19 Mounting and Installation 23 Piping 23 Wiring 24 LED indicator 28 System overview 35 Initial Configuration 42 AMS Operation Setting 46 OPC
41.5 48 56 80 83 86.5 D-F7lWV 5 14 18 40 45 42.5 39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16
Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.