Vacuum Pad: Ball Joint Type

13 40 2 ZPR16F-0-B5 ZPR25F-0-B5 16 18 M5 x 0.8 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 32 35 13 16 29.8 47 ZPR32F-0-B8 M8 x 1.25 Q: 4 Q: 6 Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

Rotary Actuator/Vane Style Series CRB2

25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 58 Series CRB2 Rotary Actuator Vane Style Dimensions: 40 Single vane type/Double vane type M5 x 0.8 depth 10 CRB2BW40-S/D 3 x M5

VZ3000

(Manifold base) VZ3120-5G-M5. 2 pcs. (Valve) DXT192-13-1A . 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Rotary Actuator

36 M5 24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10 25 (16) (10) 10 Rotary Actuator Series CRB2 Vane Type Dimensions: 10 Double vane # Following figures show the intermediate rotation

Refrigerated Thermo-chiller

/14 5/7 13/14 5/5 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 26 60 46 20 14 Refer to page 94.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which

Mini Free Mount Cylinder

x 35 l M5 x 40 l M5 x 45 l M5 x 50 l M5 x 55 l M5 x 60 l M5 x 65 l M5 x 70 l M5 x 75 l M5 x 80 l 20 8.5 M4 x 20 l 9.5 9.5 25 M4 x 25 l 8 7.5 25 M5 x 25 l 11.5 12 Series CUJ Clean Series How to Order Double acting 10 12 30 D C D UJ B F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

Manifold Specifications

(Manifold base) VZ3120-5G-M5. 2 pcs. (Valve) DXT192-13-1A . 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Solenoid Valve

Output) Serial Transmission System IP67 compliant Indicator light Manual override L2 L1 79.5 72 46 P = 25 65.5 6.5 2 x M5 Mounting hole B A B A A A B A B A B A 163 143 9 9 10 A A A A A A A 42 34.5 80 B B B B B 55.5 SI Unit Please use drip proof plug assembly (AXT100-B04A) with unused conduit port (G1/2). n 1 2 3 4 5 6 7 Stations D side 8 U side 3/4" 3(R) port 1/2" 1(P) port 4 x G1/2 Conduit

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

0.

INA-25-46 AN101-01 Series One-touch fitting KJS04-M5 IN-457-32 (for 6) KQ2H06-01S VQZ100 VQZ200 VQZ300 KQ2H06-M5 KQ2S06-01S KQ2H08-02S Ground nut Set screw Tightening torque 1.65 to 2.5 NNm Tightening torque 0.3 to 0.4 NNm The diameter of the above fitting and silencer is the maximum diameter to in the EXH port.

VCB

8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Stainless Steel 316

(mm) Connection thread R Note 1) L2 M Weight (g) A D L1 L1 Applicable tubing M KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S 3.5 18 16 18.3 M5 x 0.8 4 18 10.6 20.5 4.2 20 19.5 1/8 20.8 D 10 A 3.5 25 17 20.5 M5 x 0.8 L2 6 18.8 9 26 20.5 23 13 1/8 22.1 H Connection thread 35 24.5 25 1/4 14 37 21.9 25.4 1/8 12

CNG

to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc

SJ3A6

Caution Single solenoid SJ3000-46-SC-l Double solenoid, 3 position type, 4 position type SJ3000-46-DC-l Connector Assembly Part No.

7

40 13 28 35 9 24 35 3.5 18.5 38 A B Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

Digital Flow Switches

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 50 40 (42.2) 73 34 Flow direction 20 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 77 80 79 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 (42.2) 60 46 Flow direction 21 Digital