Compact Cylinder 10 5 10 5 10 10 20 12 50 412 742 1072 16 20 25 32 Weight 40 (g) Weight 50 Action Bore size (mm) Cylinder stroke (mm) (N) Single Acting, Spring Extend 5 10 15 20 Bore size (mm) Stroke (mm) Spring reaction force (N) Second First 12 16 20 25 32 40 50 12 16 20 25 32 40 50 29 35 42 51 2.9 2.8 3.9 3.9 5.3 5.9 9.8 9.8 20 20 20 20 24 24 11 9.7 20 20 27 27 29 29 29 29 29 29 83 83 5 10 5 10 5
1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows Vacuum
Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
40 10 95 17 56 20 13 15 12 58 11 M8 x 1.25 7 18 M18 x 1.5 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 65 20 18 12 15 58 11 M10 x 1.25 7 18 M18 x 1.5 41 to 750 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20 23 18 17 71 13 M12 x 1.75 10 22 M22 x 1.5 45 to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 93.5 22 25 20 19 72 16 M12 x 1.75 10 26 M26 x 1.5 With Bellows (mm) (mm) Bore
25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11
) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)
to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/
40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb
16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 32 50 18 28 56 25 40 3 71 13 89 M10 x 1.5 10 22 35 M22 x 1.5 86 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 41 60 22 32 64 30 50 3 71 16 110 M12 x 1.75 10 26 43 M26 x 1.5 106 (mm) (mm) With Air Cushion With Rod Boot (mm) Bore size Rc, NPT port WA WB Wq WH GA GB P 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20
16 50 59 72 45 20 16.5 11 38 32 Up to 1200 35 27 32 2 14 14 58 M10 x 1.5 depth 16 63 68 89 53.5 25 19 13 50 37 Up to 1400 40 32 40 3 20 20 71 M10 x 1.5 depth 22 80 79 110 64.5 30 20 16 60 37 Up to 1500 40 41 50 3 20 20 71 M12 x 1.75 depth 22 100 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ +0.08 0 8 20 M8 x 1.25 15 1/8 11 11 M5 x 0.8 15 118 5.5 4 24 81 0.5 5 6 10 +0.08 0
port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
KQ2Y06-M5 14.7 M5 x 0.8 M6 x 1.0 7 11.6 17.1 28.7 13.5 17.1 4.5 4.5 KQ2Y06-M6 15.7 7 8 1 8 KQ2Y06-01S 39 22.1 12 10 6 12.8 17 10 20 1 4 KQ2Y06-02S 26.5 41 17 14 10.6 13.4 20 D 3 8 KQ2Y06-03S 27.9 42.5 34 1 8 1 4 KQ2Y08-01S KQ2Y08-02S 43.5 45.5 23.6 28 12 14 22 8 14 17.7 15.2 18.5 25.6 12 23 3 8 KQ2Y08-03S 17 29.4 47 36 Connection thread 1 8 KQ2Y10-01S 26.1 49.5 31
With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type
10 12 6 50/20 5 16 50/20 Actuation type Ball screw Ball screw + Belt [1:1]/Ball screw Sliding bushing (Piston rod) 41 to 101F (5 to 40C) 90 or less (No condensation) 100 W/l40 AC servo motor (100/200 VAC) Ball screw + Belt [1.25:1] Sliding bushing (Piston rod) 41 to 101F (5 to 40C) 90 or less (No condensation) 200 W/l60 AC servo motor (100/200 VAC) Guide type Operating temp. range Operating
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5
27 25 28 89 114 26.5 40 83 2 Note 1) 65 29.5 3.2 2.5 50 5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4
size (mm) Q QA P R T S Z S Z 15st 81 92 101 110 118 129 5 st 38 41 45 41 45 47 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 61 67 76 75 83 94 10 st 71 77 86 85 93 104 15 st 81 92 101 100 108 119 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 61 67 76 85 93 104 10 st 71 77 86 95 103 114 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5
20 14 15.5 19 75 15 1/4 104.5 58.5 5 32 18 63 Up to 600 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 1/4 119.5 68 9 37 22 80 Up to 800 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 1/4 150 81 11.5 26 37 100 Up to 800 55 25 40 41 16 114 189 89 22 30 30 20 19 37.5 116 20 1/4 170 96 17 Bore size (mm) T S U V L GF K MM Q RR H VA W Z ZZ J P GE N 34 32 154 13 6.5 18.3 6 23 M10