SV

L Dimension n: Stations L n 2 123 112.5 90.5 19.5 63 3 135.5 125 101 20.5 73.5 4 148 137.5 111.5 21.5 84 5 160.5 150 122 22.5 94.5 6 173 162.5 132.5 23.5 105 7 173 162.5 143 18 115.5 8 185.5 175 153.5 19 126 9 198 187.5 164 20 136.5 10 210.5 200 174.5 21 147 11 223 212.5 185 22 157.5 12 235.5 225 195.5 23 168 13 235.5 225 206 18 178.9 14 248 237.5 216.5 19 189 15 260.5 250 227 20 199.5 16

44

19 19 1/2" (12.7) 3/8" (9.53) KQG2 KFG2F1395-N03 42 19 3/8 31.6 15.6 8.5 8.5 51 19 KG KFG2 KFG2 Union Nut: KFG2N MS Weight (g) H (Width across flat) Applicable tubing O.D.

CS1

90 43 31 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 160 161 128 212 112 255 M14 X 1.5 50 47 36 59 16 15 20 90 43 14 19 31 35 to 1000 3/4 M36 X 1.5 18.5 180 182 144 236 118 275 M16 X 1.5 53 56 20 19 40 90 59 43 14 17 36 39 to 1200 3/4 M40 X 1.5 115 18.5 200 204 162 265 132 320 M18 X 1.5 60 63 24 25 17 39 45 70 48 20 41 to 1200 Lube Non-lube 3/4 1 M45 X 1.5 115 18.5 225 226 182 280 150

2/3 Port Valve

Refer p.4.1-18, 4.1-19 for specifications and models.

MB1

to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18 Series MB1 Order Made Specifications Contact SMC for detailed specifications, lead times and prices.

Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

High Pressure Coolant Valve

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions. Design Mounting Direction of Pilot Solenoid Valve Warning Warning 1. Extended periods of continuous energization If a valve is continuously energized for long periods, heat generation of the coil may result in reduced performance and shorter service life.

High Vacuum L Type Valve

TY 1st printing: SU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 19 XL-OMS0001-B

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

EX500-GPR1A.eng

TS M12 connector ( socket ) /10 pcs. 40 41 Item No. Solution/Corrective action PROFIBUS DP compatible communication Field wireable connector Communication cable (With one side connector) Terminal plug PCA-1557727(Plug, B-coded) SOL LED is turned on 4 Check the power for solenoid valves/output ( DC24V ) is supplied.

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

AC Servo Motor Driver (Pulse input type)

Servo amplifier Driver Controller (Note 6) CN1 (Note 6) (Note 2) 21 DICOM 24VDC (Note 4) CN1 Trouble (Note 5) 20 46 DICOM 48 ALM RA1 Zero speed detection DOCOM 23 ZSP (Note 3) Emergency stop Servo-on Reset Speed selection 1 Speed selection 2 EMG SON RES 42 15 19 (Note RA2 Limiting speed 25 VLC RA3 Ready (Note 10) 49 RD SP1 SP2 41 16 RA4 10m max.

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.