REA/REB

43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 1200 LEFS40lll-1200l 1453.4 1206 1378 18 8 1200 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

CLK1

-R5006 CKA40-18-206C CKB40-18-207B Double knuckle joint CKA40-40-209A 75mm stroke CKA40-40-210A Weights (Basic weight is for a 0mm stroke.)

Clamp Cylinder with Lock Series CLK1

-R5006 CKA40-18-206C CKB40-18-207B Double knuckle joint CKA40-40-209A 75mm stroke CKA40-40-210A Weights (Basic weight is for a 0mm stroke.)

15

LEC Y Size Motor type MM TT PD PP NZ M2.5 x 10 1.0 8 12.5 NY M2.5 x 10 1.0 8 12.5 NX M2.5 x 10 1.0 8 7 NM1 M3 x 5 0.63 5 10.5 NM2 M2.5 x 10 1.0 6 12.4 Motorless Motorless 25 LAT LEY32D, LEYG32lD: NM1 NZ M3 x 12 1.5 14 18 NY M4 x 12 3.6 11 18 NX M4 x 12 3.6 9 5 NW M4 x 12 3.6 9 12 NV M4 x 12 3.6 9 5 NU M4 x 12 3.6 11 12 NT M3 x 12 1.5 12 18 NM1 M4 x 5 1.5 6.35 2.1 NM2 M4 x 12 3.6 10 3 LZ [

VZ3000

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Station n L1 L2 Station 2 66 46 Station 20 408 388 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350 19 389 369 64 Series SYJ7000 Type 41: Side Ported/SS5YJ7-41Stations -01 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 14 L2 31.5 20.5 85.2 [87.4] 86 [88.2] 107.4 [111.8

Rotary Clamp Cylinders

45 36 20 53.5 9 67 14 18 6 15 to 25 M8 x 1.25 6.2 43 18 45 36 20 61 9 67 14 18 6 M10 x 1.5 8.2 53 23 65 46 22 77 11.5 88 18 22 8 30 to 40 M10 x 1.5 8.2 52.5 23 65 46 22 76.5 11.5 88 18 22 8 8 Rotary Clamp Cylinder: Heavy Duty Type 20, 25, 32, 40, 50, 63 Series MK2 See MK-Z How to Order MK2 10 R 20 B F M9BW Rotary clamp cylinder Heavy duty type Number of auto switches Nil S 2 pcs. 1 pc.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Table of Contents

Without brake 18 85 Mitsubishi Electric Corporation With brake 3.2 Yaskawa Electric Corporation Cable length 18 5m 05 Applicable cables LJ1 (non-standard motor), LXP/LXS (AC servomotor) 35 Model Manufacturer part no. 16 MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LJ1-1-G051 4.5 101 110 18 MFECA0050FAB (for motor) MFMCA0050AEB (for encoder) MFMCB0050CET (for brake) LJ1-1-G05B LJ1-7

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Tamper Proof and Flat Head Screw

55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8 6 17 39.3 AS321F-N03-07ST AS321F-03-08ST 15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5

2/3 Port Valve

Refer p.4.1-18, 4.1-19 for specifications and models.

MB

18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

SV

Specified layout (Up to 18 solenoids possible.) 18 18 18 stations 18 stations Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. Note 1) Double wiring specifications: Single, double and 3 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal.