CS1

72 8 48 105 M30 X 1.5 30 47 53.1 46 18 44 M30 X 1.5 Y-16 40 32 80 8 55 110 M36 X 1.5 34 46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

44

51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12 21 22 26.2 9.3 IDK

OMU0023

INP = 1 indicates that the target location has been reached. 18 Repeat steps 17-18 After settling time, the operation of step data No.20 is 19 completed. 66 - Caution If the direct operation parameters such as target position (Step Data No. 20) for D9103 to D9115 are changed using the "Direct Operation Step Data setting" function during direct operation, the changed parameters will not be

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 18 Not included for Option Z (Removed parts) 19 Not included for Options Z and Z1 (Removed parts) 18 HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR050-W-20-(DM)U(YZ) Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.59 Control method PID control

Hydraulic Cylinders

(mm) Rod end male threads a b c e f g h Bore size (mm) 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 86 40 26 30 M20 x 1.5 7 19 40 95 50 31 35 M24 x 1.5 8 24 46 106 63 41 45 M30 x 1.5 9 30 58 125 80 56 60 M39 x 1.5 14 41 77 155 100 71 75 M48 x 1.5 21 50 101 197 7 Series CHKDB Auto Switch Specifications Auto Switches: Proper Mounting Positions and

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

JXCx-OMU0004

CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Compact Hydraulic Cylinder Series CH
KGB

Rod end male threads (mm) Bore size (mm) a b c e f g h 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 91 40 26 30 M20 x 1.5 7 19 40 105 50 31 35 M24 x 1.5 8 24 46 116 63 41 45 M30 x 1.5 9 30 58 135 80 56 60 M39 x 1.5 14 41 77 165 100 71 75 M48 x 1.5 21 50 101 207 19 Series CHKGB Auto Switch Specifications Auto Switches: Proper Mounting Positions