Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

VFR

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5

Round Type Low Pressure Hydraulic Cylinder Series CH
M

13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG

OMU0023

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Memory Outline . 12 5.3 Message Frame Formats . 13 5.4 Details of Function Codes supported by LATCA . 17 (1) 01h Read the status of output signals . 17 (2) 02h Read the status of input signals . 19 (3) 03h Read data contents of holding register addresses . 21 (4) 05h Write (force) a single output signal . 23 (5)

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 20 26 14 32 11.5 65 Operating port 2 x Rc1/8 (NPT1/8, G1/8) Other dimensions are the same as basic type. 820 MXQ 1322Air Slide Table Dimensions: MXQ25 1322Basic Operating port 2 x Rc1/8 (NPT1/8, G1/8) J I 15 Max. 17 (Retraction end adjuster) 7.5 17 17 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 4 0.004 0.012 0 0.036 0 0.043 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 1 14 19.5 22 29 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 12 5 1.5 18 21.2 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0.004 0.012 0 0.043 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 14 6 1.5 20 25 34.5 42 17 10 0.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 0 0.043 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 1 14 19.5 22 29 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 12 5 1.5 18 21.2 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 14 6 1.5 20 25 34.5 42 17 10 0.5

Rotary Table/

SU) S A (mm) A AU AV AW AX AY BA BB Size 1 2 3 7 1 YA 28 2.8 11 8.2 5.5 1.5 35 39.6 30 3.6 12.6 9.2 7 2 37 45.1 34.5 4.4 15.5 10.5 8 2.5 43 46.7 YB effective depth YC 41 4.8 18.4 12.2 10 3 50 59.2 (mm) BC BD BE BG BH BI BJ D DD DE DF DG FA FB FD H J JA JB JC JD JE JF JG Size 1 2 3 7 4.5 32 17 11 8.2 30 4.5 27h9 27.5h9 14H9 3.5 4.5H9 4.8 2 3.7 9 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5H9 5.5

Compact Cylinder with Air Cushion

L d m t M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41 15.0 19.6 25.4 31.2 37.0 47.3 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 0.040 0.076 8 20 C8 type for pivot 21 7.6 16.2 1.5 0.9 IY-G02 0.040 0.076 10 25 C10 type for pivot 25.6 9.6 20.2 1.55 1.15 IY-G03 0.040 0.076 10 32,40 C10 type for pivot 41.6 9.6 36.2 1.55 1.15 IY-G04 0.050 0.093 14 50,63 C14

RQ

42 48 44.5 47.5 43.5 18 8 18.5 8.5 15.5 5.5 23.5 13.5 63 50 47.5 48.5 54.5 51 54 50 18 13.5 18.5 14 15.5 11 23.5 19 80 63 57.5 58.5 64.5 61 64 60 20.5 16.5 21 17 18 14 26 22 100 80 67.5 68.5 74.5 71 74 70 25.5 20 26 20.5 23 17.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 37.5 31.5 7-7-17 17 Series RQ Operation Range 100 Switch model Bore size (mm) 25 32 40 50 63 80 20 D-A7, A80 D-A7H, A80H D-A73C

VCW

11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

Series KV2 Fittings

17 21 21 21 22 22 25 17 17 21 21 21 22 22 25 17 21 21 17 22 22 21 25 3.5 3.5 5.4 3.5 5.4 8.5 5.4 9.8 12 15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.

0.4

Lead wire color Dot marking 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 The D-sub connector cable assembly can be ordered individually or included in a specific manifold model no. Refer to How to Order Manifold.

Environment

radius [mm] (Reference values) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.