CNG

(12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300 301 to 800 20 to

MHY2/MHW2

the attachment or main body. 2.8-12 180 Angular Gripper Series MHY2 MHY2-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2

Rotary Gripper Series MRHQ

M5 x 0.8 (one each on three sides) Port B 47h9 0 0.062 4-M5 x 0.8 Depth 8 8 N I J E A D P A A M N 22 R R SMC 12 E O P T 25 P A I R 8 R G Y 11 A R I 6 6 29 Side A Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

5 Port Solenoid Valve SY Series

0.8 16.9 13.1 SY3120-M5(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3120-W0(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

MXW Series Long Stroke Slide Table

10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35 30 280 5 51 35 102.5 158 111 MXW12-125 137 35 32.5 330 6 76 60 127.5 182 136 MXW12-150 164 40 47.5 380 6 101 85 147 MXW Series Long Stroke Slide

1

14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Compact Cylinder

Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6

VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold

Heavy Duty Stopper Cylinder Series RSH/RS1H

Note 2) Refer to page 10 for lead wire length.

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

VK300

Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

CLK1

47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 Note) Refer to pages 13 and 14 for accessories.

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500