Compact Cylinder Series CQS

27 27 34.5 37.5 32 32 39.5 42.5 8.5 8.5 9.5 10 13.5 13.5 14.5 15 5, 10 -X Individual -X Note) For basic style 12 and 16 with 5 stroke, through-hole is threaded over the entire length.

Table of Contents

x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10

Stability of suction position,

to 80 Dimensions/With Female Thread Adapter: Vacuum Inlet Lateral Pad form Flat type with groove ZP3E-Y32UMl-B8 ZP3E-Y40UMl-B8 ZP3E-Y50UMl-B8 19 19 19 16 16 16 8.5 8.5 8.5 M8 x 1.25 14.5 M8 x 1.25 14.5 M8 x 1.25 14.5 5 14.5 44.1 5 5 M5 x 0.8/ Effective thread depth 5 M10 x 1 M5 x 0.8/ Effective thread depth 5 M10 x 1 M5 x 0.8/ Effective thread depth 5 9.5 9.5 9.5 M10 x 1 15 44.6 14.5 44.1

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

24

and 16, M5 x 0.8 is only available.

Micro Mechanical Valve Series VM1000

Max. 6 R port (3 port only) (62) 32 24 16 Symbol 2 port (A) 2 12 10 1 (P) 30 (A) 2 3 port 17 44 25.4 10.5 12 10 1 (P) 3 (R) 2 x 4.6 mounting hole 14 8.5 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Roller plunger VM122-M5-06A VM132-M5-06A VM122-M5-06SA VM132-M5-06SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across flats 17 10

Dual Rod Cylinder Series CXSJ/CXS

75 44 8 16 14 30 16 76 2 x M6 x 1.0 2 x 11 counterbore depth 6.3 Q QQ R T TT U W UU V Model 4 x M5 x 0.8 thread depth 4.5 4 x Rc 1/8 thread depth 6.5 4 x Rc 1/8 thread depth 6.5 2 x M6 x 1.0 thread depth 10 2 x M8 x 1.25 thread depth 12 2 x M8 x 1.25 thread depth 12 8 x M4 x 0.7 thread depth 5.5 8 x M5 x 0.8 thread depth 7.5 8 x M5 x 0.8 thread depth 7.5 7.75 12.5 45 9.5 6.5 8 CXS20 8.5 15

Parallel Style Air Gripper Series MHZ

MHZ26 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 M3 x 0.5 0.88 10 Max. tightening torque (Nm) Max. screw-in depth ( l mm) Applicable bolts M3 x 0.5 0.69 5 Model M4 x 0.7 2.1 8 MHZ2-6 Note) M2 x 0.4 0.15 4.5 M5 x 0.8 4.3 10 Attachment MHZ2-10 M3 x 0.5 0.88 6 M6 x 1 7.3 12 MHZ2-16 M4 x 0.7 2.1 8 M6 x 1 7.9 13 MHZ2-20 M5 x 0.8 4.3 10 M8 x 1.25 17.7 16 MHZ2-25 M6 x 1 7.3 12 MHZ2-32 M6 x

ZP

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27

Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

7.5

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Applicable tubing: Inch sizes standardized Inch sizes are now available for all models. 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 6 8 10 4 AS121FM-M5 AS131FM-M5 M5 x 0.8 AS221FM-01 AS231FM-01 R 1/8 AS221FM-02 AS231FM-02 R 1/4 AS121FM-U10/32 AS131FM-U10/32 10-32 UNF AS221FM-N01 AS231FM-N01 NPT 1/8 AS221FM-N02 AS231FM-N02 NPT 1/4 Specifications Fluid Air AS Proof pressure 1.5 MPa Max. operating

MGP

16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100

MHZ

20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Base Mounted Metal Seal/Rubber Seal Series VQ

Maximum stations are 16. VV5Q05 Manifold Specifications Porting specifications Applicable stations Port size Port location U side D side Series Stations 3 2 1 1(P), 3(R) 4(A), 2(B) Side VQ0 Max. 16 C6 C3, C4, M5 Side VQ1000 Max.16 stations C8 C3, C4, C6, M5 Wiring specifications: Positive COM The lead wires are connected to the valve as shown below.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAY23-M5 15 9.6 28.5 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 33 3.4 2.9 9 1 8 KAY23-M6 KAY23-U01 10 3.2 17.5 10 KAY04-M5 KAY04-M6 16 18 18.5 15.5 M5 x 0.8 M6 x 1 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 KAY04-U01 1 4 KAY04-U02 22 34 34.5 15 20 9 14 10 10 18 6.4 6.4 KAY06-M5 KAY06-M6 16.5 20 20.5 16 M5 x 0.8 M6 x 1 32

SQ1000/2000

outputs Master unit: A1SJ61QBT11 16 outputs (Type SDR1) 8 outputs (Type SDR2) 16 outputs 37 Plug-in Type Series SQ2000 L4 L3 L2 L1 47.8 P = 17.5 28.8 5.25 Indicator light M5: External pilot port 58 Manual override PWR.

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0